1) coma
[英]['kəʊmə] [美]['komə]
彗差
1.
Results There were no significant differences in higher-order aberrations (HOA), spherical aberrations (SA) and coma under non-accommodation.
结果调节放松状态各组间的总高阶像差、彗差、球差差异均无显著性,水平彗差和球差与总高阶像差存在线性相关(P值分别为0。
2.
In order to meet the demand of coma measurement accuracy of lithographic tool projection lens,a novel method for measuring coma based on fine overlay error metrology marks is proposed.
为了满足光刻机投影物镜彗差测量精度的要求,提出一种基于套刻误差测试标记的彗差检测技术,分析了彗差对套刻误差测试标记空间像的影响,详细叙述了该技术的测量原理,并利用PROLITH光刻仿真软件对不同数值孔径与部分相干因子设置下套刻误差相对于彗差的灵敏度系数进行了仿真实验。
3.
It is shown that the symmetry of the spectral response and the coupling efficiency will be deteriorated when the coma appears during the diffraction and imaging.
最终证明彗差会造成谱形失称 ,明显降低耦合效率 ;而球差则会明显地增加串扰 。
3) Coma-type aberration
彗形像差
4) Off-centering coma
偏心彗差
5) Sub coma
亚彗差
6) coma
[英]['kəʊmə] [美]['komə]
彗形象差
补充资料：彗差
见像差。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条