Based on the classically elastic theory and the Lennard-Jones potential law,the elastic model of adhesive contact is established to investigate such problems as adhesion,contact and deformation in micro-mechanical systems,and the variations with the gap between two spheres of the adhesive force,deformation and contact radius are obtained.

RF/MW MEMS filter has low insertion loss, high isolation and linearity, miniature size, and easy for integration with IC and MMIC circuits, which can fundamentality change alter the structure and characteristics of traditional RF, MW and millimeter wave devices.

Due to the micro-effect in MEMS, the dynamics analysis of MEMS is different from that of traditional machine.

The micro electro-mechanical system(MEMS) and integrated circuit technology were adopted to manufacture the solid piezoresistive silicon flat chip with high precision and sensitivity,and packaged on the concentrated stress location of an elastic beam by glass powder sintering,and the special piezoresistive acceleration sensor was developed with th.

Taking precise microminiature mechanical systems as assembly objects,the reconfigurable 12 degree of freedom(DOF) microassembly technology and realization method are systematically proposed,including modules such as 6-DOF macro-robot,6-DOF precise micromotion worktable,micro gripper integrated micro detection and feedback,and micro pose detection device,and so on.