1.
Electro-thermal actuator using non-silicon micro fabrication technology
一种非硅微加工技术制作的电热微驱动器
2.
Study on Technology of Electrochemical Micromachining of Silicon Microchannel Array;
硅微通道列阵电化学微加工技术研究
3.
Preparation of SiO_2-based Waveguide Films and Their Fine-patterning;
二氧化硅基光导膜的制备及微细加工
4.
Experimental Research of Micro-EDM for Through-Silicon-Via
硅阵列通孔微细电火花加工试验研究
5.
THE CRYSTALLIZATION DYNAMICS STUDY ABOUT THE CANASITE MACHINABLE GLASS-CERAMICS
硅碱钙石可加工微晶玻璃的析晶动力学研究
6.
Micro theoretical model for grinding SiC mirror with fixed abrasive
固着磨料加工碳化硅反射镜的微观理论模型
7.
Related Techniques of a New Micro-accelerometer Based on Non-silicon MEMS;
基于非硅MEMS的新型微机械加速度计若干技术的研究
8.
Design and Fabricate Process of a Three-frame MEMS Gyroscope;
三框架硅微机械陀螺的结构设计及加工工艺研究
9.
High-performance MEMS RF Passive Components and Silicon Micromachined Technology;
高性能MEMS射频无源器件与三维硅微机械加工技术
10.
Research on Thick Film Hybrid Integration Fabrication and Program of Micromechanical Accelerometer;
硅微加速度传感器厚膜混合集成方案与工艺研究
11.
Research on Silicon-based Bulk Micro-machined Amperometric Microelectrode Biosensors;
基于体硅加工技术的安培型微电极生物传感器研究
12.
Monte Carlo Simulation of Multiple Masking Processes for Anisotropic Wet Etching
多次掩模湿法腐蚀硅微加工过程的蒙特卡罗仿真
13.
Pressure Nonlinearity of Micromachined Pressure Sensors
微机械加工薄膜压力传感器的非线性特性
14.
Studies on Preparation Process and Stability of Acid Silica SOL from Microsilica
用微硅粉制备酸性硅溶胶的工艺及稳定性研究
15.
On the stability of silicon microstructure acceleration transducer
硅微结构加速度传感器稳定性的研究
16.
Structure design and simulation of micromechanical silicon oscillating accelerometer
硅微谐振式加速度计结构设计与仿真
17.
Micro-machined static mixers only 22mm2, etched from silicon wafers, can be used for small chemical sensors.
微型加工的静态混合器只有22mm2大，由硅片刻蚀而来，可用于小型化学传感器。
18.
Research on Fabrication of Silicon Micro-cantilevers based on MEMS Technology
基于MEMS技术硅微悬臂梁制作工艺研究