1.
Research on Process of Polysilicon Nanofilm Pressure Sensor
多晶硅纳米薄膜压力传感器工艺研究
2.
Research of Nc-Si/c-Si Heterojunction MOSFETs Pressure-magnetic Mutli-sensor;
纳米硅/单晶硅异质结MOSFETs压/磁多功能传感器研究
3.
Design of Polysilicon Nano-Film MEMS Pressure Sensor Structure
多晶硅纳米薄膜MEMS力敏结构研究
4.
Study on Piezoresistive Principle and Properties of Polysilicon Nanofilms;
多晶硅纳米薄膜压阻机理与特性的研究
5.
Molecular Dynamics Simulation on In-Plane Thermal Conductivity of Single-Crystal Si Film at Nanoscale;
单晶硅纳米薄膜面向热导率的分子动力学模拟
6.
Light-emitting Thin Films and Devices Based on Silicon-rich Nitride and Nano-silicon Multi-quantum-well Structures
富硅氮化硅和纳米硅多层量子阱硅基发光薄膜与器件
7.
Study of ZnO Thin Film Piezoelectric Micro Force Sensor/Actuator;
ZnO薄膜压电微力传感器/执行器研究
8.
Multi-wall Carbon Nanotube Films Sensor Applied to SF_6 PD Detection
检测SF_6气体局部放电的多壁碳纳米管薄膜传感器
9.
Size dependent mechanical properties of nanocrystalline Cu films
纳米压痕法测量纳米晶金属Cu薄膜力学性能的研究
10.
Influence of Doping Concentration on Gauge Factor and Linearity of Polysilicon Nanofilms
掺杂浓度对多晶硅纳米薄膜应变系数及其线性度的影响
11.
Mechanical Properties of Nanocrystalline Hydrogenated Silicon Thin Films with Different Crystalline Volume Fractions
不同晶态比条件下氢化纳米硅薄膜的力学性能(英文)
12.
Micromachining of Membrane and Cavity in Micro Pressure Sensors
微型压力传感器薄膜凹槽的制造技术
13.
Experimental Study on SAW SO_2 Sensor Based on Carbon Nanotube-polyanilin Films
碳纳米管聚苯胺薄膜SAW SO_2传感器的实验研究
14.
Formation of Al Ohmic Contacts to Polysilicon Nanofilms
Al金属多晶硅纳米膜欧姆接触的制作
15.
Infrared analysis on hydrogen content and Si-H bonding configuration of hydrogenated nanocrystalline silicon thin films
纳米晶硅薄膜中氢含量及键合模式的红外分析
16.
Effects of Deposition Pressure on Nanocrystalline Silicon Thin Film by Magnetron Sputtering
沉积压力对磁控溅射纳米硅薄膜结构和性能影响
17.
Development of Nanonized PZT Film Bulk Acoustic Resonator
纳米晶PZT薄膜体声波谐振器的研究
18.
Study of Piezoelectric Quartz Crystal Sensors Based on the Enhancement of Nanogold Particle;
纳米金增效压电石英晶体传感器性能的研究