1.
Investigation on ECR Plasma Deposition and Dielectric Property of SiCOH Low-k Films;
SiCOH低k薄膜的ECR等离子体沉积与介电性能研究
2.
MW-ECR Plasma Enhanced Unbalance Magnetron Sputtering and Carbon Nitride Films Preparation;
微波-ECR等离子体增强非平衡磁控溅射技术及CN薄膜的制备研究
3.
Investigation on Low-κ SiCOH Films Prepared by ECR-CVD and the Influence of Fluorine Incorporation;
SiCOH低κ薄膜的ECR等离子体制备及F掺杂效应研究
4.
The Characteristic of ECR Plasma and Its Application in Deposition of GaN Thin Film;
ECR等离子体参数空间分布特性研究及制备GaN薄膜中的应用
5.
Study on ECR Hydrogen Plasma Treatment of SiC Surface;
SiC表面ECR氢等离子体处理研究
6.
Study on ECR Hydrogen Plasma Treatment of N-type 4H-SiC
N型4H-SiC ECR氢等离子体处理研究
7.
Spectroscopic Study on the Interactions between Pulsed-Laser-ablation-produced Plasma and ECR Plasma
脉冲激光烧蚀等离子体和ECR放电等离子体相互作用的光谱研究
8.
ion plasma wave and ionic plasma oscillation
离子等离子体波和离子等离子体振荡
9.
plasma-enhanced CVD
等离子体增强ＣＶＤ
10.
stripped plasma
完全电离的等离子体
11.
plasma isotope separation method
等离子体同位素分离法
12.
high ionized laser plasma
强电离激光等离子体
13.
plasma disappearance
等离子体消失, 等离子体失踪
14.
diamagnetism of the plasma particles
等离子体粒子反磁性
15.
collision between particles in plasma
等离子体中的粒子碰撞
16.
plasma particle simulation
等离子体粒子数值模拟
17.
HIPAC (Heavy Iron Plasma Accelerator)
重离子等子体加速器
18.
plasma astrophysics
等离子体天体物理学