1.
plasma sputter combined etching
等离子溅射复合刻蚀
2.
Plasma emission spectra of ZnO and ZAO thin film grown by RF magnetron sputtering
ZnO和ZAO薄膜磁控溅射等离子体发射光谱
3.
Effects of plasma pretreatment on silver sputtering film deposited on PP nonwovens
等离子体预处理对丙纶基材溅射银薄膜的影响
4.
diode sputter-ion pump
二极管溅射离子泵[抽机]
5.
in line sputterer
直列式离子溅射装置
6.
Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP film
等离子体发射光谱诊断用于射频磁控溅射GaP薄膜的工艺参数优化
7.
Diagnosis of the Plasma in the EBIT and the Experimental Study of the Sputtering Induced by the Impact of Highly Charged Ion on Solid Surface
EBIT中等离子体的分析和高电荷态离子与固体表面溅射实验的研究
8.
Study on Compositions Controlling and Properities of Magnetron Sputtering Films Based on Plasma Optical Emission Spectroscopy
基于等离子体光发射谱的磁控溅射薄膜成分控制及性能研究
9.
MW-ECR Plasma Enhanced Unbalance Magnetron Sputtering and Carbon Nitride Films Preparation;
微波-ECR等离子体增强非平衡磁控溅射技术及CN薄膜的制备研究
10.
Plasma Characteristics of Mid-frequency Dual-targets Magnetron Sputtering System and Oxide Films Deposition Research;
中频孪生磁控溅射等离子体特性与氧化物薄膜沉积研究
11.
Electrical Characteristics and TiN Film Deposition of Plasma Assisted Magnetron Sputtering;
外部等离子源辅助磁控溅射电特性及TiN薄膜制备研究
12.
The Barrier Mechanism Research of The Ceramic Thin Film by Plasma Auxiliary Magnetron Sputtering
等离子辅助磁控溅射陶瓷薄膜阻隔机理的研究(英文)
13.
Ti–Si–C–N Based Nanocomposite Coatings Produced by Plasma Enhanced Magnetron Sputter Deposition and its Erosion Resistance
等离子增强磁控溅射Ti–Si–C–N基纳米复合膜层耐冲蚀性能研究
14.
THE SIMULATION RESEARCH ON ENERGY LOSS AND RANGE OF SPUTTERING IONS
离子溅射能量损失及射程的模拟研究
15.
Computer Simulation of the Transportation and the Sputtering of Ions in RF Magnetron Sputtering;
射频磁控溅射镀膜过程中离子输运和溅射行为的模拟计算
16.
low pressure triode method
低压三极管离子溅射方法
17.
Sandwich Type Distributed Sputtering Ion Pump with φb 6 mm Anode Holes
Φ6毫米阳极孔层状分布式溅射离子泵
18.
Research on Carbon Nitride Films Prepared by Ion Beam Sputtering;
离子束溅射法制备C-N薄膜的研究