1.
in line sputterer
直列式离子溅射装置
2.
Sandwich Type Distributed Sputtering Ion Pump with φb 6 mm Anode Holes
Φ6毫米阳极孔层状分布式溅射离子泵
3.
microprocessor automated sputterer
微处理曝制的溅射装置
4.
the emitting positions of the sputtered atoms are close to the corresponding incident ions (in the order of angstrom);
溅射原子的出射位置就在离子入射位置的附近(埃数量级);
5.
diode sputter-ion pump
二极管溅射离子泵[抽机]
6.
plasma sputter combined etching
等离子溅射复合刻蚀
7.
KEYWORDS: GIMS, ion source, anode layer, sputtering, TiN, ion plating， medium frequency, pulsed DC.
中文关键词：气离溅射、子源、极层流、射、化钛、子镀膜、频、冲直流。
8.
direct write electron beam system
直写式电子束光刻装置
9.
continuous belt ion exchange system
连续带式离子交换装置
10.
vertical incidence ionosonde
垂直投射电离层探测装置
11.
Controlled fabrication of Si nanocones by using diamond film as a mask under ion beam sputtering
金刚石薄膜为掩膜离子束室温溅射可控制备硅纳米圆锥阵列
12.
The Calculation of Electromagnetic Distribution and Particle Movement in Magnetron Sputtering Equipment;
磁控溅射装置中电磁场分布及粒子运动行为的计算分析
13.
Software Design of Real-time Monitoring System of Unbalanced Magnetron Sputtering Ion-plating Equipment in Closed Field;
闭合场非平衡磁控溅射离子镀装备实时监控系统软件设计
14.
THE SIMULATION RESEARCH ON ENERGY LOSS AND RANGE OF SPUTTERING IONS
离子溅射能量损失及射程的模拟研究
15.
APPLICATION OF MAGNETIC MIRROR IN DIRECT COUPLER MPCVD DIAMOND FILMS DEVICE
磁镜场在直接耦合式微波等离子体CVD金刚石膜装置中的应用
16.
Computer Simulation of the Transportation and the Sputtering of Ions in RF Magnetron Sputtering;
射频磁控溅射镀膜过程中离子输运和溅射行为的模拟计算
17.
low pressure triode method
低压三极管离子溅射方法
18.
Research on Carbon Nitride Films Prepared by Ion Beam Sputtering;
离子束溅射法制备C-N薄膜的研究