1.
Research on the Synthesis and Growth Parameters of Carbon Nanotubes by Plasma-enhanced Chemical Vapor Deposition;
PECVD技术制备碳纳米管及其生长参数的研究
2.
Fast growth of nanocrystalline silicon film prepared with low hydrogen flow rate by using PECVD at low-temperature
用PECVD技术低温低氢稀释快速生长纳米晶硅薄膜的研究
3.
The Study of the Coating of Silica Glass by PECVD
PECVD制备玻璃态SiO_2薄膜技术研究
4.
A spectroscopic ellipsometry study of the abnormal scaling behavior of high-rate-deposited microcrystalline silicon films by VHF-PECVD technique
椭圆偏振技术研究VHF-PECVD高速沉积微晶硅薄膜的异常标度行为
5.
Study of Diamond-Like Carbon Films by ICP-PECVD
ICP-PECVD法制备类金刚石膜
6.
Properties of a-Si: H Prepared by RF-PECVD & DBD-PECVD and Their Compare;
RF-PECVD和DBD-PECVD制备a-Si：H薄膜的性能研究及其比较
7.
Synthesis of Carbon Nanotubes Using Dielectric Barrier Discharge Plasma Enhanced Chemical Vapor Deposition (DBD-PECVD);
利用DBD-PECVD方法制备碳纳米管的研究
8.
Annealing Behavior of Silicon Nitride Thin Film Deposited by PECVD;
PECVD沉积的氮化硅薄膜热处理性质研究
9.
Structure Analysis of Polycrystalline Silicon Films Prepared by ECR-PECVD at Low Temperature;
多晶硅薄膜ECR-PECVD低温生长结构研究
10.
Research of Poly-Si Films Deposited by ECR-PECVD at Low-temperature;
ECR-PECVD法低温沉积Poly-Si薄膜的研究
11.
Investigation of Diamond-Like Carbon Films Deposited by RF-PECVD;
RF-PECVD法制备类金刚石薄膜的研究
12.
Preparation of Poly-Silicon Thin Film in Low Temperature Using SiH_4 as Gas Source by ECR-PECVD;
以硅烷为气源用ECR-PECVD制备多晶硅薄膜
13.
Low-temperature Deposition of Poly-silicon Thin Films by ECR-PECVD and Its Characteristic Analysis;
多晶硅薄膜的ECR-PECVD低温沉积及特性
14.
Investigation of Carbon Nitride Thin Film by DBD-PECVD
DBD-PECVD法制备CN薄膜的研究
15.
Preparation of a-SiC: H Films by PECVD and Research of Laser Annealing
PECVD制备a-SiC:H薄膜及激光退火研究
16.
Structure Analysis of Silicon Films Deposited by Plasma Enhanced Chemical Vapor Deposition
硅薄膜的PECVD制备及其结构研究
17.
Process Research on PECVD SiN-x:H Film for Crystalline Silicon Solar Cells
晶体硅太阳能电池PECVD SiNx:H薄膜工艺研究
18.
Raman Spectra Analysis of Bromine Doped Hydrogenated Amorphous Carbon (a-C∶Br∶H) Films Deposited by RF-PECVD
RF-PECVD掺溴非晶碳氢膜的Raman光谱分析