1.
In resent years, the mature of Micro-Electro-Mechanical System (MEMs) and the rapid development of Nano-Technology make it possible to manufacture mechanical and electrical devices in nano-scale.
近年来由于微机电技术的成熟普及与奈米机电技术的发展，各种机电元件均趋于微型化。
2.
Manufacturing Technologies for MEMS at Micro/Nanometer Level
微/纳米级微电子机械系统制造新技术
3.
General specification for low-light level television cameras
GB/T15465-1995微光电视摄像机总技术条件
4.
Microelectronics and Computer Technology Corporation
微电子和计算机技术公司
5.
General requirements for tropical electrical micro-machine
GB/T10761-1989热带微电机基本技术条件
6.
General requirements for electrical micro machine for automatic control system
GB/T7345-1994控制微电机基本技术要求
7.
Integrated Design Method for MEMS with Realization Technology
微机电系统集成设计方法与实现技术
8.
Key Technology Research of Meshing Micro-Motor;
啮合式微型电机若干关键技术的研究
9.
Research on the Terminal Behaveior Modeling of Micro Electro Mechanical System;
微型机电系统端点特性建模技术研究
10.
Technology of micro electro mechanical system and its application;
微机电系统(MEMS)技术及其应用
11.
" Motors, asynchronous, miniature, electronic regulator, general specification for"
GB/T16961-1997电子调速微型异步电动机通用技术条件
12.
The Research and Development on the Microcomputer Relay Protection for 500kV Substation;
500kV变电站微机继电保护的技术改进研究
13.
Investigation of Electro Chemical Deep Etching Technology for Micro-nano-Electro-Mechanical System Device Fabrication;
应用于微纳机电器件制造的电化学深刻蚀技术
14.
Study of a highly sensitive miniature condenser microphone based on MEMS technology
基于微电子机械系统技术的高灵敏度电容式微传声器的研制
15.
Generic specification for microcomputer
GB/T9813-1988微型数字电子计算机通用技术条件
16.
Technology Summary of the MEMS and Applied Prospects for the 21 Century
微型机电系统技术及其21世纪应用展望
17.
Experimental Investigation on the Removal of Particulates in Diesel Engines by Using Pulsed Corona Technology
脉冲电晕技术降低柴油机微粒排放的实验研究
18.
NEW MEMS MANUFACTURING TECHNOLOGIES
微电子机械系统的新制造工艺技术(英文)