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tivated micromachining
电子束显微机械加工
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electronic machinability computer
机械加工性电子计算机
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electron and ion beam microfabrication
电子束与离子束微细加工
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machine tool for working by electron beam processes
电子束处理加工机床
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Research on Microchannel Fabrication of PCR Chip by Electron Beam Lithography Based on Overlapped Scanning
电子束重复曝光加工PCR微通道的工艺研究
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Sensor Electronics and Micromachine ?
传感电子学与微机械
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Properties of Excimer Laser Etching of Typical MEMS Materials
典型微机械材料的准分子激光加工特性
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NEW MEMS MANUFACTURING TECHNOLOGIES
微电子机械系统的新制造工艺技术(英文)
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Some Microelectromechanical Systems and Related LIGA Techniques
若干微电子机械系统研制及相关LIGA工艺研究
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Study on MEMS Based Planar Micromotor
基于微机械工艺的平面微电机的研究
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Microstructure of Ti_2AlNb Joint Produced by Electron Beam Welding
Ti_2AlNb基合金电子束焊接头的显微组织
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Synthesize and Application in Micro-fabrication of Organic-inorganic Composite Magnetic Nanoparticles;
有机—无机复合磁性纳米粒子的制备及其在微机械加工中的应用
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machine tool fro working by ionic beam processes
离子束处理加工机床
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nal dual ion beam processing machine
多功能双离子束加工机
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Detection circuit design of MEMS capacitive accelerometer
微机械电容式加速度计检测电路设计
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Manufacturing Technologies for MEMS at Micro/Nanometer Level
微/纳米级微电子机械系统制造新技术
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Study on a New Electromagnetic Micromotor in Micro Electronic Mechanical System;
微电子机械系统中新型电磁微电机的研究
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Application of computing technique and microelectronics in textile machinery and technology of textile production.
在纺织机械和纺织生产工艺中应用电脑技术和微电子装置的问题