1.
Fabrication of P-type Amorphous Silicon Thin Films and Poly-Silicom by PECVD;
PECVD法制备P型非晶硅薄膜及多晶硅薄膜
2.
Preparation of Poly-Silicon Thin Film in Low Temperature Using SiH_4 as Gas Source by ECR-PECVD;
以硅烷为气源用ECR-PECVD制备多晶硅薄膜
3.
The Effect of Crystallization Ratio on Dark Conductivity of Poly-Silicon Thin Films;
多晶硅薄膜晶化率对暗电导率的影响
4.
Study of High Image Quality Amorphous-Silicon Thin Film Transistor Liquid Crystal Displays
高像质非晶硅薄膜晶体管液晶显示器的研究
5.
The Preparation of Device-Quality Hydrogenated Amorphous Silicon Thin Films by Mwecr-Cvd Assisted by Hot-Wire;
热丝辅助MWECR-CVD制备器件级非晶硅薄膜
6.
Structure Analysis of Polycrystalline Silicon Films Prepared by ECR-PECVD at Low Temperature;
多晶硅薄膜ECR-PECVD低温生长结构研究
7.
Growth of Polycrystalline Silicon Thin Films on Flexible Substrate;
在柔性衬底上制备多晶硅薄膜的研究
8.
Low-temperature Deposition of Poly-silicon Thin Films by ECR-PECVD and Its Characteristic Analysis;
多晶硅薄膜的ECR-PECVD低温沉积及特性
9.
Research Progress on the Hydrogen Content Control of Hydrogenated Amorphous Silicon Thin Films
氢化非晶硅薄膜H含量控制研究进展
10.
Influence of boron on the properties of intrinsic microcrystalline silicon thin films
硼对沉积本征微晶硅薄膜特性的影响
11.
An optical emission spectroscopy study on the high rate growth of microcrystalline silicon films
高速沉积微晶硅薄膜光发射谱的研究
12.
Study on the Microstructure of Microcrystalline Silicon Thin Films by VHF-PECVD
VHF-PECVD制备微晶硅薄膜的微结构研究
13.
Preparation of Polycrystalline Silicon Film on Upgraded Metallurgical Silicon Substrate by ECR-PECVD;
在升级冶金级硅衬底上用ECR-PECVD沉积多晶硅薄膜
14.
Studies on Preparing Poly-Si Thin Film on Ssp Substrate at Low-temperature;
以硅带为衬底低温制备多晶硅薄膜的研究
15.
The Effects of Active Layer Thickness on the Characteristics of Amorphous Silicon Thin Film Transistors
有源层厚度对非晶硅薄膜晶体管特性的影响
16.
Aluminum-induced Rapid Crystallization of Amorphous Silicon Films in an Electric Field at Low Temperature;
铝诱导非晶硅薄膜的场致低温快速晶化
17.
A Research on Driving Module of Poly-Si TFT OLED;
多晶硅薄膜晶体管有机发光显示模块的研制
18.
Studies on Grain-boundary States in Polysilicon Films FET;
多晶硅薄膜场效应结构的晶粒间界能态分布