1.
Properties of Excimer Laser Etching of Typical MEMS Materials
典型微机械材料的准分子激光加工特性
2.
Research on Fabrication of Concentric Circles Microstructure Based on PMMA by Excimer Laser
准分子激光加工PMMA同心圆环微结构的实验研究
3.
Study on Characterization and Characteristics of Surface Topography by Excimer Laser;
准分子激光加工表面微观形貌表征及其特征研究
4.
Study on the Process and Mechanism of Excimer Laser Micro-Machining;
准分子激光微细加工工艺和加工机理研究
5.
Microlens Fabrication with Excimer Laser and Diaphragm;
准分子激光光阑法加工微透镜的工艺研究
6.
Fabrication of Photonic Crystal Microcircuits by Excimer Laser Micromachining System
利用准分子激光微加工系统制备光子晶体线路
7.
Research on Machining of High-aspect-ratio Microstructures Based on Excimer Laser;
基于准分子激光大深宽比微结构加工工艺研究
8.
Progress of Excimer Laser Micromachining Based on Microfabrication of Microfludic Biochips
基于微流体芯片的准分子激光微加工技术的研究进展
9.
cadmiummercury excimer laser
镉汞受激准分子激光器
10.
The Operation Principle and Methods and Criterion of Quality Assurance (QA) for Excimer Laser
准分子激光器工作原理及质量保证方法和标准
11.
xenon fluoride excimer laser
氟化氙准分子激光器
12.
xenon chloride excimer laser
氯化氙准分子激光器
13.
tunable excimer laser
可调谐准分子激光器
14.
krypton fluoride excimer laser
氟化氪准分子激光器
15.
mercury chloride excimer laser
氯化汞准分子激光器
16.
krypton chloride excimer laser
氯化氪准分子激光器
17.
Experimental Study on Excimer Laser Electrochemical Etching Process of Silicon;
准分子激光电化学刻蚀硅工艺实验研究
18.
excimer pumped dye laser
受激准分子泵浦染料激光器