1.
Influence of Substrate Temperature on the Growth of μc-SiGe Thin Film
衬底温度对氢化微晶硅锗薄膜生长的影响
2.
Microcrystalline Silicon-Germanium Thin Films by RT-Pecvd and Its Application to Solar Cell;
反应热CVD法制备微晶硅锗薄膜及其太阳电池应用研究
3.
Metal-Induced Crystallization of Amorphous Silicon and Silicon Germanium Films
非晶硅和非晶硅锗薄膜的金属诱导结晶
4.
Research in Growth of Poly-Si_(1-x)Ge_x on SiO_2 by UHVCVD;
利用UHV/CVD在SiO_2薄膜上生长多晶锗硅薄膜的研究
5.
Study on the Microstructure of Microcrystalline Silicon Thin Films by VHF-PECVD
VHF-PECVD制备微晶硅薄膜的微结构研究
6.
Influence of boron on the properties of intrinsic microcrystalline silicon thin films
硼对沉积本征微晶硅薄膜特性的影响
7.
An optical emission spectroscopy study on the high rate growth of microcrystalline silicon films
高速沉积微晶硅薄膜光发射谱的研究
8.
The Study of Growth of SiGe Thin Films and Electrical Properties by UHVCVD;
UHVCVD生长锗硅薄膜及其电学性能研究
9.
Study of the Low-dimensional Structures on the SiGe Alloys and the Photoluminescence;
硅锗薄膜上低维结构及PL光谱研究
10.
Study of a-Si:H Microstructure by MWECR CVD Technique;
MWECR CVD制备氢化非晶硅薄膜的微结构研究
11.
Fabrication of the Microcrystalline Silicon Materials and Solar Cells by PECVD;
PECVD法制备微晶硅薄膜材料及太阳能电池
12.
Investigation on Activation Energy of Intrinsic Microcrystalline Silicon Thin Films Deposited by VHF-PECVD
VHF-PECVD沉积本征微晶硅薄膜激活能特性研究
13.
High rate growth and electronic property of μc-Si∶H
微晶硅薄膜高速沉积及电学性质的研究
14.
Optimized Growth Conditions and High Deposition Rate of μc-Si∶H Films
氢化微晶硅薄膜的两因素优化及高速沉积
15.
Single-chamber deposition of intrinsic microcrystalline silicon thin film and its application in solar cells
单室沉积本征微晶硅薄膜及其在电池中的应用
16.
Influence of Hydrogen on Microcrystalline Silicon Thin Film in Low Temperature Deposition and Annealling Process
氢在微晶硅薄膜低温沉积及退火过程中的影响
17.
Fabrication of P-type Amorphous Silicon Thin Films and Poly-Silicom by PECVD;
PECVD法制备P型非晶硅薄膜及多晶硅薄膜
18.
Solar cell industry and application of silicon germanium thin film;
太阳能电池产业与半导体锗硅薄膜的应用综述