1.
Analysis of Micro Electrostatic Actuator Applying for Phase Change Probe-based Data Storage System
用于探针存储系统的硅微静电驱动器的分析
2.
The Mechanics Analysis of MEMS Pendulous Oscillating Gyroscopic Accelerometer with Electrostatic Comb-driver and Capacitance Read-out
静电驱动电容检测微机械陀螺式加速度器的力学分析
3.
Design and Simulation of Electrostaticlly Actuated MEMS Microwave Switch;
静电驱动MEMS微波开关设计与仿真
4.
Analysis and simulation of comb-drive electrostatic structure coupled field
静电梳齿驱动器静电-结构耦合的仿真分析
5.
DYNAMIC CHARACTERISTICS OF ELECTROSTATICALLY ACTUATED MEMS UNDER PARAMETRIC EXCITATIONS
参数激励下静电驱动微机电系统动力特性研究
6.
Study of the Control System of the Axial-Drive Electrostatic Micromotor with Levitated Rotor;
悬浮转子轴向驱动静电微电机的控制系统研究
7.
The Mechanics Analysis of MEMS Gyroscope with Electrostatic Comb-driver and Piezoelectric Thin Films Read-out;
静电驱动压电检测微机械陀螺仪的力学分析
8.
An Out-Of-Plane Eletro-Thermal Polymer Actuator;
聚合物基（SU-8）面外运动电热微驱动器
9.
The Repair-experience of the AC Driver of the Electrostatic Printer and the Method to Improve the Circuit;
静电复印机的AC驱动器维修及电路的改进方法
10.
Static and dynamic performance of inchworm-type piezoelectric rotary actuator
尺蠖型压电旋转驱动器的静动态特性研究
11.
Study on PZT Piezoelectric Thin Film Micro-actuator;
基于PZT压电薄膜的微驱动器研究
12.
Motor Controller Module of MC9S12HZ Microcontroller and Its Application
MC9S12HZ微控制器电机驱动模块及其应用
13.
Research of actuation characteristic of a curved cantilever electrostatic actuator
弯曲悬臂梁静电执行器驱动特性的实验研究
14.
Design and fabrication of MEMS comb-drive actuator with large displacement
大位移MEMS静电梳齿驱动器的设计及制作
15.
Electro-thermal actuator using non-silicon micro fabrication technology
一种非硅微加工技术制作的电热微驱动器
16.
Development and applications of piezoelectric actuator in MEMS
微机电系统用压电驱动器的发展及应用
17.
Development of a Novel Electric-Thermal-Driven MEMS Micro-Relay
一种新型的电热驱动MEMS微继电器的研制
18.
An Electrostatically-driven Capacitively-sensed Frame Microgyroscope Fabricated with an Improved Process Flow
一种静电驱动电容检测的微机械陀螺及其工艺改进