1.
Research Progress on the Hydrogen Content Control of Hydrogenated Amorphous Silicon Thin Films
氢化非晶硅薄膜H含量控制研究进展
2.
Study of a-Si:H Microstructure by MWECR CVD Technique;
MWECR CVD制备氢化非晶硅薄膜的微结构研究
3.
Study of Photoelectric Properties of a-Si:H Deposited by MW-ECR CVD;
MW-ECR CVD制备氢化非晶硅薄膜之光电特性研究
4.
Fabrication of Hydrogenarated Amorphous Silicon Thin Films by PECVD and the Study of Metal Induced Crystallization;
PECVD法制备氢化非晶硅薄膜及其金属诱导晶化研究
5.
Investigation on Preparing an Even Large Area and Excellent Optoelectric Properties Hydrogenated Amorphous Silicon Film with Higher Rate;
高速沉积大面积均匀氢化非晶硅薄膜及其优异的光电特性的研究
6.
Studies of a-Si:H Microstructure by Hot Wire Assisted Mwecr CVD Technique;
热丝辅助MWECR CVD制备氢化非晶硅薄膜的微结构研究
7.
Research on the Preparation, Microstructure and Optoelectronic Properties of Hydrogenated Amorphous Silicon Thin Films
氢化非晶硅薄膜制备及其微结构和光电性能研究
8.
Structure and Properties of Hydrogenated Amorphous Silicon Thin Films by R.F and D.C Magnetron Sputtering
氢化非晶硅薄膜的直流和射频磁控溅射法制备及其表征
9.
INVESTIGATION ON LARGE EVEN HYDROGENATED AMORPHOUS SILICON FILMS DEPOSITED BY HW-MWECR CVD SYSTEM
用HW-MWECRCVD系统沉积大面积均匀氢化非晶硅薄膜的研究
10.
Experimental Study of Internal Friction of a-Si:H Films Charged with Hydrogen
氢化非晶态硅薄膜的渗氢内耗实验研究
11.
Optimized Growth Conditions and High Deposition Rate of μc-Si∶H Films
氢化微晶硅薄膜的两因素优化及高速沉积
12.
Influence of Substrate Temperature on the Growth of μc-SiGe Thin Film
衬底温度对氢化微晶硅锗薄膜生长的影响
13.
Aluminum-induced Rapid Crystallization of Amorphous Silicon Films in an Electric Field at Low Temperature;
铝诱导非晶硅薄膜的场致低温快速晶化
14.
Crystallization behavior of amorphous silicon thin films induced by excimer laser irradiation
准分子激光引起的非晶硅薄膜晶化行为的研究
15.
Fabrication of P-type Amorphous Silicon Thin Films and Poly-Silicom by PECVD;
PECVD法制备P型非晶硅薄膜及多晶硅薄膜
16.
Metal-Induced Crystallization of Amorphous Silicon and Silicon Germanium Films
非晶硅和非晶硅锗薄膜的金属诱导结晶
17.
Influence of Hydrogen Flow on Grain Size of Nano-Crystalline Sic Films Grown by HFCVD Method
HFCVD法制备纳米晶体碳化硅薄膜中氢流量对晶粒尺寸的影响
18.
Effect of hydrogen dilution on crystalline properties of nano-crystalline silicon thin films in fast growth
氢稀释对高速生长纳米晶硅薄膜晶化特性的影响