1.
Detection Circuit Design for Resonant Micro-machined Pressure Sensor
谐振式微机械压力传感器检测电路研究
2.
Research of a Novel Micromachined Resonant Pressure Sensor
一种新型微机械谐振式压力传感器研究
3.
Pressure Nonlinearity of Micromachined Pressure Sensors
微机械加工薄膜压力传感器的非线性特性
4.
Study on High-Sensitivity Pressure Sensor Based on Surface Micro-Machining
基于表面微机械加工的高灵敏度压力传感器研究
5.
A Micromachined Piezoresistive Accelerometer with Axially Deformed Tiny Beams;
一种微梁直拉直压的微机械压阻式加速度传感器
6.
The Mechanical Analysis of Micromachined Accelerometer with Piezoelectric Thin Films Read-out;
压电薄膜微机电加速度传感器的力学分析
7.
Sensitive Mechanism of Micromachined Airflow Omnibearing Posture Sensor
微机械气流式全方位姿态传感器的敏感机理
8.
Silicon Micro-pressure sensor based on Meso-piezoresistance
介观压阻型硅微压力传感器仿真分析
9.
Study of ZnO Thin Film Piezoelectric Micro Force Sensor/Actuator;
ZnO薄膜压电微力传感器/执行器研究
10.
Structural Analysis of Micromachined Piezoresistive Pressure Sensors for Dynamic Pressure Measurements
面向动态压力测量的微型压力传感器敏感结构
11.
Experimental Research on the Pressure Micro-sensor with Magnetic Fluid Used in MEMS
用于微机电系统磁流体压力微传感器的实验研究
12.
Applications of Piezoelectric Bimorph Beams on Micromotors and Micro Force Sensors;
压电双晶梁在微电机及微力传感器上的应用研究
13.
A Study on Factors Affecting Miniaturization of Piezoresistive Pressure Sensors
压阻式微型压力传感器微型化限制因素的研究
14.
Sensor Electronics and Micromachine ?
传感电子学与微机械
15.
A Study on the Design and Fabrication of Micro Pressure Sensors;
微压力传感器的设计与制作工艺研究
16.
Study on MEMS Piezo-resistance 3-D Micro-tactile Force Sensor
MEMS压阻式三维微触觉力传感器的研究
17.
Diaphragm based miniature fiber optic pressure sensor with F-P cavity
膜片式微型F-P腔光纤压力传感器
18.
Micromachining of Membrane and Cavity in Micro Pressure Sensors
微型压力传感器薄膜凹槽的制造技术