1.
Plasma Diagnosis with Langmuir Probe in Plasma Enhanced Chemical Vapor Deposition
PECVD镀膜机等离子体静电探针诊断
2.
Study on CMP Slurry of CVD Diamond Film;
CVD金刚石膜化学机械抛光液的研制
3.
The Research of Synthesis Technology and Mechanism on Diamond Films at Low Temperature in MWPCVD;
微波等离子体低温CVD金刚石膜工艺和机理研究
4.
Influence of different grain size on mechanical properties of CVD diamond film
不同晶粒尺寸对CVD金刚石膜机械性能的影响
5.
The Research about Mechanism of Plasma arc Polishing CVD Diamond Films
CVD金刚石膜等离子体弧抛光的机理研究
6.
Microstructure and Properties of Silicon Based Nano-composite Thin Films by CVD and Research of Novel Antireflecting Energy Saving Coating Glass;
CVD法纳米硅系复合薄膜的微结构、性能及新型无光污染节能镀膜玻璃的研究
7.
hollow cathode ion coater
中空阴极离子镀膜机
8.
Research of Vacuum Coating Robot Motion Control System;
真空镀膜机器人运动控制系统的研究
9.
Design of sputtering vacuum machine based on the Atemga128
基于Atemga128的磁控溅射镀膜机(英文)
10.
An intelligent tension control system for a film metal coating machine based On PLC
基于PLC的镀膜机智能张力控制系统
11.
Characterization and Formation of Silane Film on Hot-Dipped Galvanized Steel Sheet
热镀锌钢表面硅烷膜的制备、表征及成膜机理
12.
The Preparation of Cubic Boron Nitride Thin Films by ECR CVD System and Study of Their Properties;
ECR CVD制备立方氮化硼薄膜及性能研究
13.
The Study of A-Si-H Films Prepared by MWECR CVD;
MWECR CVD制备a-Si:H薄膜光稳定性研究
14.
The Preparation of Device-Quality Hydrogenated Amorphous Silicon Thin Films by Mwecr-Cvd Assisted by Hot-Wire;
热丝辅助MWECR-CVD制备器件级非晶硅薄膜
15.
Deposition Process Study of Device Quality a-Si:H Film by Method of MWECR CVD with High Deposition Rate;
MWECR CVD高速制备a-Si：H薄膜的工艺研究
16.
The Study of the Coating of Silicon Dioxide by CVD Utilizing TEOS-O_3;
CVD法采用TEOS-O_3沉积二氧化硅膜
17.
Study on Growth and Optical Emission of a-SiN_x: H Films Prepared by ECR-CVD;
ECR-CVD制备a-SixN：H薄膜及其发光性能的研究
18.
Fundamental Study on High-efficiency Polishing for CVD Diamond Thick Film;
CVD金刚石厚膜高效抛光的基础研究