1.
Micro phenomena measurement to silicon resonant microsensor are resented in this paper.
主要论述硅谐振微传感器中微现象测量。
2.
Design and Fabrication of Thermally Excited Si_3N_4 Resonant Beam Pressure Sensor;
热激励氮化硅谐振梁压力传感器的设计与制作
3.
It gives an exposition of the thermally excited silicon resonator pressure sensor and the thermally excited resonating membrane mass flow sensor.
评价性地论述了热激励硅谐振压力传感器和热激励谐振膜质量流量传感器。
4.
vibrating silicon crystal transducer
石英晶体谐振式传感器
5.
Micromechanical Resonant Cantilever Sensors for Bio/chemical Detection;
生化检测用集成微机械悬臂梁谐振传感器技术
6.
Research on Moisture Cotent Measurement Sensor Using Microwave Coaxial Resonant;
基于微波谐振腔的物料水分传感器研制
7.
Research and Development of Analysis System Base on Vibrating Cylinder Micro-mass Sensor
谐振筒微质量传感器的分析系统的研究
8.
Detection Circuit Design for Resonant Micro-machined Pressure Sensor
谐振式微机械压力传感器检测电路研究
9.
Novel Resonant Micro Flow Sensor Based on MEMS Technology
一种基于MEMS技术的新型谐振式微流量传感器
10.
Research of a Novel Micromachined Resonant Pressure Sensor
一种新型微机械谐振式压力传感器研究
11.
Model and Elimination for Co-Channel Interference in Diffused Silicon Resonant Pressure Sensor
扩散硅谐振式压力传感器同频干扰的建模与消除
12.
Interface Circuit Design and Test for MEMS Resonant Microcantilever Biological Sensors;
MEMS谐振式微悬臂梁生物传感器的接口电路设计和测试
13.
Analysis of the Resonant Frequency of Capacitive Micro-Machined Ultrasonic Transducer(cMUT) with Finite Element Method
硅微电容式超声换能器谐振频率的有限元分析
14.
Performance Compare of Lateral Polysilicon Comb-drive Microresonators with Different Flexural Suspensions
不同型式支撑的静电硅微谐振器的性能比较
15.
Mechanical Performance of Micro One-sided Straight-leg Beam Resonator
静电梳状硅微单侧直脚谐振器的力学性能
16.
Analysis on Transmission Characteristics of Microring Resonators with Gain
带有增益的微环谐振器传输特性分析
17.
Modeling of Resonant Piezoelectric Ice Sensor;
压电谐振式结冰传感器数学模型研究
18.
Research on Airborne Resonant Diaphragm Density Sensor
航空机载谐振膜式密度传感器的研究