1.
Aqueous-soluble Hyperbanched Polyesters: Snthesis and Photoresists for Microoptics;
高支化碱溶性聚酯的合成及其微光学光刻胶
2.
Research of SOCS Based Simulation Algorithm of Optical Lithography System;
基于SOCS的光学光刻系统仿真算法的研究
3.
The Chemically Amplified Resist Composition and Its Lithography for Electronic Beam;
化学增幅光刻胶及其在电子束光刻中的应用
4.
laser engraving, laser etching
激光雕刻，激光蚀刻
5.
Research of Focus Optical System Used in Ultraviolet Photolithography;
用于紫外光刻的聚焦光学系统的研究
6.
Optical properties and process of the diluted SU8 resist
改性SU8光刻胶的光学特性及其工艺
7.
High Precision Laser Direct Writing System for Micro-optical Device;
高精度微光学器件激光直写光刻系统研究
8.
Method and Simulation of Micro Optical Elements Fabricated by Digital Lithography Technology;
数字光刻及其制作微光学元件的模拟研究
9.
Two-mirror system design study of reduced projection optics for EUV Lithography;
极紫外投影光刻两镜微缩投影系统的光学设计
10.
Optical head supporting sub wavelength structure with UV interference lithography
支持亚波长结构光刻的紫外干涉光学头
11.
raster scan electron beam lithography
光栅扫描电子束光刻
12.
brilliant cutting
(玻璃)磨光刻花法
13.
808nm Laser-Induced Electrochemical Etching
808nm激光诱导电化学刻蚀研究
14.
Research of SU-8 Resist Lithography Using Ultraviolet Laser;
紫外激光曝光光刻SU-8胶的工艺研究
15.
Study on Synthesis of Photoresist and Photochemical Process for Information Recording in Laser Disc
激光光盘信息记录光刻胶的合成与感光
16.
Experimental Study on Excimer Laser Electrochemical Etching Process of Silicon;
准分子激光电化学刻蚀硅工艺实验研究
17.
Study of the Laser-chemical Combined Etching for Hard-to-machine Material;
难加工材料激光与化学复合刻蚀加工的研究
18.
The study of the voltage effect on laser-induced electrochemical etching of silicon
外加电压对激光电化学刻蚀硅的影响研究