1.
Effect of Non-Parallel Combs of Capacitive Micro-Sensor on Reliable Operation Range
梳齿的不平行对电容式微机械传感器可靠工作范围的影响
2.
Effect of Non-Parallel Combs of the Capacitive Micro-Sensor on the Pulse Signal Response
梳齿的不平行对电容式微机械传感器阶跃信号响应的影响
3.
Sensitive Mechanism of Micromachined Airflow Omnibearing Posture Sensor
微机械气流式全方位姿态传感器的敏感机理
4.
Sensor Electronics and Micromachine ?
传感电子学与微机械
5.
Features and Applications of 3031 Accelerometer
微机械3031型加速度传感器特点分析及应用
6.
Research on reliability of the MEMS convective accelerometer
微机械热对流加速度传感器可靠性研究
7.
Micromechanical Resonant Cantilever Sensors for Bio/chemical Detection;
生化检测用集成微机械悬臂梁谐振传感器技术
8.
Micromechanical Capacitive Accelerometer and Its Characteristic Research;
微机械电容式传感器及其相关特性研究
9.
Detection Circuit Design for Resonant Micro-machined Pressure Sensor
谐振式微机械压力传感器检测电路研究
10.
Overview on Micro-machined tilt sensors Based on gas Convection
基于气体热对流的微机械倾角传感器综述
11.
Electric Field Micro-sensor with a Closed-loop Autonomous Driving Circuit
一种闭环自激式驱动的硅微机械电场传感器
12.
Research of a Novel Micromachined Resonant Pressure Sensor
一种新型微机械谐振式压力传感器研究
13.
Pressure Nonlinearity of Micromachined Pressure Sensors
微机械加工薄膜压力传感器的非线性特性
14.
Study of micro-mechanical gas-flow level-gesture sensor's structure
微机械气流式水平姿态传感器的结构研究
15.
A Micromachined Piezoresistive Accelerometer with Axially Deformed Tiny Beams;
一种微梁直拉直压的微机械压阻式加速度传感器
16.
Integration and Packaging of Sensors and MEMS Devices Through Low Temperature Wafer Bonding
用低温圆片键合实现传感器和微电子机械系统器件的集成和封装
17.
Theory and Design of Optical Current Sensor Based on MEMS
基于微电子机械系统的光学电流传感器原理与设计
18.
A High Performance Accelerometer with a Newly Developed Silicon Bulk Micromachining Technology;
新型体微机械工艺制造高性能加速度传感器的研究