1.
Detection circuit design of MEMS capacitive accelerometer
微机械电容式加速度计检测电路设计
2.
Micromechanical Capacitive Accelerometer and Its Characteristic Research;
微机械电容式传感器及其相关特性研究
3.
Design and Simulation of Micromachined Silicon Condenser Microphone with Free Floating Diaphragm
具有自由悬浮敏感膜的硅微机械电容式麦克风的设计与仿真计算
4.
A High Linear Interface Circuit for Micro Machined Differential－capacitance Type Accelerometer
高线性微机械差分电容式加速度计测量电路
5.
Design of Self-Excited Driving ASIC Circuit for Capacitance Micro-Machined Gyroscope
电容式微机械陀螺自激驱动ASIC电路设计
6.
Influence Research of Bias Voltage on Capacitive Micro-mechanical Accelerometer
偏置电压对电容式微机械加速度计的影响研究
7.
Design and Optimization of a RF MEMS Variable Capacitor
一种射频微机械可变电容的设计与优化
8.
Design of upper limit of measurement range on capacitive micromachined acceler ometer
电容式微机械加速度计测量范围上限设计
9.
Structure and dynamic characteristics of silicon condenser micromachined microphone
电容式硅微机械麦克风的结构与动态特性
10.
Study of a highly sensitive miniature condenser microphone based on MEMS technology
基于微电子机械系统技术的高灵敏度电容式微传声器的研制
11.
Research of Detection Circuit for Area Changeable Micro-machined Capacitive Accelerometer;
变面积电容式微机械加速度传感器检测电路的研究
12.
The Mechanics Analysis of MEMS Pendulous Oscillating Gyroscopic Accelerometer with Electrostatic Comb-driver and Capacitance Read-out
静电驱动电容检测微机械陀螺式加速度器的力学分析
13.
An Electrostatically-driven Capacitively-sensed Frame Microgyroscope Fabricated with an Improved Process Flow
一种静电驱动电容检测的微机械陀螺及其工艺改进
14.
tivated micromachining
电子束显微机械加工
15.
Sensor Electronics and Micromachine ?
传感电子学与微机械
16.
Effect of Non-Parallel Combs of Capacitive Micro-Sensor on Reliable Operation Range
梳齿的不平行对电容式微机械传感器可靠工作范围的影响
17.
Effect of Non-Parallel Combs of the Capacitive Micro-Sensor on the Pulse Signal Response
梳齿的不平行对电容式微机械传感器阶跃信号响应的影响
18.
Study of Micromachined Inertial Sensors Based on a Novel Comb-bar Capacitor Scheme
基于新型梳状栅电容结构的微机械惯性传感器研究