1.
Thermal Deformation of EUV Mask and its Influence on Lithographic Performance;
极紫外光刻掩模热变形及其对光刻性能的影响
2.
Research on Precise Mechanism and Related Control Technologies of Euvl Stage;
极紫外光刻机工件台精密机械及控制相关技术
3.
Investigation on Extreme Ultraviolet Lithography;
极紫外投影光刻中若干关键技术研究
4.
Two-mirror system design study of reduced projection optics for EUV Lithography;
极紫外投影光刻两镜微缩投影系统的光学设计
5.
Research of SU-8 Resist Lithography Using Ultraviolet Laser;
紫外激光曝光光刻SU-8胶的工艺研究
6.
Research of Focus Optical System Used in Ultraviolet Photolithography;
用于紫外光刻的聚焦光学系统的研究
7.
Study on Key Technologies in UV-LED Fiber Lithography System
紫外LED光纤光刻系统关键技术研究
8.
Development of a High ThermoStability UV Positive Photoresist and a 248nm Deep-UV Photoresist;
耐高温紫外正型光刻胶和248nm深紫外光刻胶的研制
9.
Research on Theory and Experiment of UV-Lithography on SU-8 Photoresist;
SU-8胶紫外光刻理论与实验研究
10.
Study of a UV Positive Photoresist and Photoacid Generators for 248nm Deep-UV Photoresist;
紫外正型光刻胶及248nm产酸剂的研制
11.
Optical head supporting sub wavelength structure with UV interference lithography
支持亚波长结构光刻的紫外干涉光学头
12.
Numerical analysis and measurement of stray light from UV ruled gratings
紫外平面刻划光栅杂散光数值分析及测试
13.
silicon photodiode vacuum ultraviolet detector
硅光电二极管真空紫外探测器
14.
The Optical Characteristic Studies of Space EUV Solar Telescope;
空间极紫外太阳望远镜光学性能研究
15.
Measure and Analysis of Discharge Produced Plasma EUV Spectrum
放电等离子体极紫外光谱测量及分析
16.
Ultraviolet light or the ultraviolet part of the spectrum.
紫外光，紫外线的紫外光或光谱的紫外线部分
17.
The Study of Novel Liquid Crystal Light Valve and Ultraviolet Photodiode Array;
新颖液晶光阀及紫外光电二极管阵列的研究
18.
Development of Ultraviolet Multi anode (128×128) Microchannel Arrays Photomultiplier Tube
紫外多阳极(128×128)微通道阵列光电倍增管的研制