1.
Preparation of AlN Piezoelectric Thin Films and a Hinged Micromachined Piezoresistive High-g Accelerometer;
AlN压电薄膜制备及铰链式高量程加速度计研究
2.
Dielectric Films of TiO_2 and AlN by Pulsed Bias Arc Ion Plating;
脉冲偏压电弧离子镀沉积TiO_2与AlN介电薄膜
3.
Study of AlN Thin Films Deposited on Mo Electrode by Reactive Magnetron Sputtering
Mo电极上磁控反应溅射AlN薄膜
4.
Preparation of Transparent (002) Preferential Orientation AlN Thin Film by Arc Ion Plating
电弧离子镀制备透明(002)AlN薄膜
5.
Structure and Properties of AlN and Fe-doped AlN Films;
AlN和Fe掺杂AlN薄膜的结构与性质
6.
Properties of Aluminum Nitride Thin Films Grown by Radio Frequency Magnetron Sputtering Using AlN Target
AlN靶材射频磁控溅射制备AlN薄膜及性质研究
7.
Research on Vapor Deposition and Control of Preferential Orientation of AlN Thin Films;
AlN薄膜的气相沉积及取向控制研究
8.
The Study of Structure and Properties of ZAO(ZnO:Al) and AlN Thin Films;
ZAO（ZnO:Al）与AlN薄膜的结构与特性的研究
9.
Research of Structure and Properties of ZnO and AlN Thin Films;
ZnO和AlN薄膜结构及其性能的研究
10.
Study of AlN Thin Films Deposited by Pulsed Laser Deposition;
脉冲激光沉积制备AlN薄膜的研究
11.
Monte-carlo Simulation of Magnetron Sputtering of AlN Thin Tilms
磁控溅射制备AlN薄膜的蒙特卡罗模拟
12.
Research on preparation of AlN thin films preferentially orientated to c-axis
c轴择优取向AlN薄膜的制备研究
13.
Analysis and Deposition of AlN Films for High Frequency Multilayered SAW Devices;
适用于多层膜高频SAW器件的AlN薄膜制备与表征
14.
Use a Theoretical Model to Investigate Reactive Sputtering of AIN Thin Films
应用模型研究反应溅射制备AlN薄膜过程(英文)
15.
Study on Bulk Acoustic Wave Ladder Filter Using AlN Thin Film
AlN薄膜体声波梯形滤波器的制备与性能分析
16.
Study of magnetic properties of FePt-AlN nano-films in different process conditions
不同工艺条件对FePt-AlN纳米薄膜磁性影响的研究
17.
Heteroepitaxial 4H-SiC Films Growth on AlN/Si(111) Composite Substrates
AlN/Si(111)复合衬底上4H-SiC薄膜的异质外延
18.
Study on the Optical Properties of Ultrathin Al Films and AlN Thin Films and Related Problems;
超薄Al膜和AlN薄膜的光学性质及相关问题的研究