1.
Study of a highly sensitive miniature condenser microphone based on MEMS technology
基于微电子机械系统技术的高灵敏度电容式微传声器的研制
2.
Manufacturing Technologies for MEMS at Micro/Nanometer Level
微/纳米级微电子机械系统制造新技术
3.
NEW MEMS MANUFACTURING TECHNOLOGIES
微电子机械系统的新制造工艺技术(英文)
4.
The Advances in Wafer Bonding and MEMS
晶圆键合技术与微电子机械系统新进展
5.
With the rapid development of MEMS technology, micro-fluids technology has been becoming one of the hot research domains of MEMS step by step.
伴随微电子机械系统的发展，微流体技术成为微电子机械领域研究的热门。
6.
STUDY ON THE MICRO-TORQUE MEASUREMENT FOR MICRO-ACTUATORS IN MEMS
微电子机械系统中微致动器力矩测试技术的研究
7.
Study on a New Electromagnetic Micromotor in Micro Electronic Mechanical System;
微电子机械系统中新型电磁微电机的研究
8.
Analysis and Design of the Architecture in 3D MEMS
三维微电子机械系统结构分析与设计
9.
Code mechanical solidification and verification in MEMS security devices
微机械电子系统安全器件中的密码机械固化与校验方法(英文)
10.
Measurement of Angular Velocity in MEMS by Optical Method
微电子机械系统中转速测量的光学方法
11.
Friction, Erosion and Research Direction in MEMS
微机械电子系统中的摩擦磨损及研究方向
12.
Research on the Testing Method of Mechanical Properties of Mems Materials
微电子机械系统材料力学性能测试方法的研究
13.
Research on Mechanical Properties and Size Effects in Mems;
微电子机械系统力学性能及尺寸效应研究
14.
Exploiting the Advantage of Regional Economy to Develop Micro Electro Mechanical System and Industry;
利用区域经济优势发展微电子机械系统及产业
15.
Some Microelectromechanical Systems and Related LIGA Techniques
若干微电子机械系统研制及相关LIGA工艺研究
16.
Research Advances of the Bonding Strength Measurements in MEMS
微电子机械系统键合强度检测方法研究进展
17.
Study of CAD Technique for Electron Optics in Microwave Tube;
微波管电子光学系统CAD技术研究
18.
The Research on Electrochemical Mechanical Finishing Technology on Cam Surface and Its Control System;
凸轮电化学机械光整加工技术及控制系统研究