1.
Fabrication of LTPS TFT with High Qualities and Design for Integration of Peripheral Drive Circuits;
高品质低温多晶硅薄膜晶体管的制作与周边一体化设计
2.
Structure Analysis of Polycrystalline Silicon Films Prepared by ECR-PECVD at Low Temperature;
多晶硅薄膜ECR-PECVD低温生长结构研究
3.
Low-temperature Deposition of Poly-silicon Thin Films by ECR-PECVD and Its Characteristic Analysis;
多晶硅薄膜的ECR-PECVD低温沉积及特性
4.
Studies on Preparing Poly-Si Thin Film on Ssp Substrate at Low-temperature;
以硅带为衬底低温制备多晶硅薄膜的研究
5.
Low-temperature Deposition of Poly-silicon Thin Films by Hot-wire CVD and the Analysis on Characteristics;
热丝法低温制备多晶硅薄膜及其特性分析
6.
Influence of Metal Underlayers on Low-temperature Deposition of Poly-silicon Thin Films by Hot-wire CVD;
过渡层对热丝法低温制备多晶硅薄膜的影响
7.
Preparation of Poly-silicon Thin Film in Low Temperature Using SiCl_4 as Gas Source by PECVD;
以SiCl_4为气源用PECVD方法低温沉积多晶硅薄膜
8.
Aluminum-induced Rapid Crystallization of Amorphous Silicon Films in an Electric Field at Low Temperature;
铝诱导非晶硅薄膜的场致低温快速晶化
9.
Fast Growth of Poly-silicon Thin Film Using SiCl_4/H_2 by PECVD at Low Temperature;
以SiCl_4为源气体用PECVD方法低温快速生长多晶硅薄膜
10.
Study on Low Temperature Preparation and Optical Properties of Crystalline Silicon Thin Films
晶体硅薄膜的低温制备技术及其性能研究
11.
Influence of Hydrogen on Microcrystalline Silicon Thin Film in Low Temperature Deposition and Annealling Process
氢在微晶硅薄膜低温沉积及退火过程中的影响
12.
INVESTIGATIONS ON FABRICATING POLY-SI THIN FILM AT DIFFERENT TEMPERATURES
在不同温度下退火制备多晶硅薄膜的研究
13.
Fabrication of P-type Amorphous Silicon Thin Films and Poly-Silicom by PECVD;
PECVD法制备P型非晶硅薄膜及多晶硅薄膜
14.
Fast growth of nanocrystalline silicon film prepared with low hydrogen flow rate by using PECVD at low-temperature
用PECVD技术低温低氢稀释快速生长纳米晶硅薄膜的研究
15.
Preparation of Poly-Silicon Thin Film in Low Temperature Using SiH_4 as Gas Source by ECR-PECVD;
以硅烷为气源用ECR-PECVD制备多晶硅薄膜
16.
The Effect of Crystallization Ratio on Dark Conductivity of Poly-Silicon Thin Films;
多晶硅薄膜晶化率对暗电导率的影响
17.
Research in Growth of Poly-Si_(1-x)Ge_x on SiO_2 by UHVCVD;
利用UHV/CVD在SiO_2薄膜上生长多晶锗硅薄膜的研究
18.
Growth of Polycrystalline Silicon Thin Films on Flexible Substrate;
在柔性衬底上制备多晶硅薄膜的研究