1.
The Properties of Ultra-thin a-SiN_x Films Prepared by Microwave ECR Magnetic Sputtering;
微波ECR磁控溅射制备超薄a-SiN_x薄膜及其特性研究
2.
An XPS study on the structure of SiN_x film deposited by microwave ECR magnetron sputtering
微波ECR磁控溅射制备SiN_x薄膜的XPS结构研究
3.
MW-ECR Plasma Enhanced Unbalance Magnetron Sputtering and Carbon Nitride Films Preparation;
微波-ECR等离子体增强非平衡磁控溅射技术及CN薄膜的制备研究
4.
Research of Preparation and Magnetic Properties of Magnetron Sputtered LSMO Films;
LSMO薄膜磁控溅射制备及磁学性能研究
5.
A New Type of the Magnetron Sputtering with a Magnet under the Substrate;
基片下外加磁场磁控溅射方法的研究
6.
Study on ZrW_2O_8 Films Prepared by Radio Frequency Magnetron Sputtering;
射频磁控溅射法合成ZrW_2O_8薄膜的研究
7.
Preparation of BN Films on Steels by Radio Frequency Magnetron Sputtering Method;
钢基表面射频磁控溅射法制备BN薄膜
8.
Computer Simulation of Thin Film Deposition by RF Magnetron Sputtering;
射频磁控溅射沉积薄膜的计算机模拟
9.
Effects of Post-Deposition Annealing on ZrW_2O_8 Thin Films by Radio Frequency Magnetron Sputtering
射频磁控溅射ZrW_2O_8薄膜的高温退火研究
10.
Preparation and Properties of Smco/cr Films by RF magnetron Sputtering More Target Together;
多靶射频磁控共溅射SmCo/Cr薄膜的制备和磁性能
11.
Investigation on Nanocrystalline Fe-N Thin Films Grown by Direct Current Magnetron Sputtering;
直流磁控溅射纳米晶Fe-N薄膜的研究
12.
Study of Magnetron Sputtring TiN Film Uesed on Nickel Intaglio Plate;
镍凹版表面磁控溅射TiN膜层性能研究
13.
Nano-β-FeSi_2/a-Si Layered Construction Prepared by Magnetron Sputtering;
磁控溅射法合成纳米β-FeSi_2/a-Si多层结构
14.
The Research on TiN Films Deposited by Magnetron Sputtering;
反应磁控溅射法制备TiN薄膜的研究
15.
The Preparation of PZT Ferroelectric Thin Films by Magnetron Sputtering Method at Low Temperature;
PZT铁电薄膜的磁控溅射低温生长
16.
Research on Preparation and Properties of Magnetron Sputtering Sb-ZnO Thin Film;
磁控溅射制备Sb-ZnO薄膜及其性能研究
17.
Study on Properties of TiN and ZrN Films Deposited by Magnetron Sputtering;
磁控溅射TiN及ZrN薄膜的特性研究
18.
Preparation and Characters of TiAlN Thin Films by Magnetron Sputtering;
磁控溅射制备TiAlN薄膜及性能分析