1.
Study of Diamond-Like Carbon Films by ICP-PECVD
ICP-PECVD法制备类金刚石膜
2.
Research of Poly-Si Films Deposited by ECR-PECVD at Low-temperature;
ECR-PECVD法低温沉积Poly-Si薄膜的研究
3.
Investigation of Diamond-Like Carbon Films Deposited by RF-PECVD;
RF-PECVD法制备类金刚石薄膜的研究
4.
Investigation of Carbon Nitride Thin Film by DBD-PECVD
DBD-PECVD法制备CN薄膜的研究
5.
Microstructures and Properties of CN Films Grown by Dielectric Barrier Discharge Plasma Enhanced Chemical Vapor Deposition
DBD-PECVD法制备CN薄膜的结构及性能研究
6.
Fabrication of P-type Amorphous Silicon Thin Films and Poly-Silicom by PECVD;
PECVD法制备P型非晶硅薄膜及多晶硅薄膜
7.
Preparation of SnO_2 Film by PECVD and Application on CdS/CdTe Solar Cells;
SnO_2薄膜的PECVD法制备及其在CdTe电池中的应用研究
8.
Fabrication of the Microcrystalline Silicon Materials and Solar Cells by PECVD;
PECVD法制备微晶硅薄膜材料及太阳能电池
9.
Overview on SiN Thin Film Prepared by PECVD for Silicon Solar Cell
PECVD法制备硅太阳电池SiN薄膜工艺研究进展
10.
Microstructures and Tribological Properties of Diamond-Like Carbon Films Grown by Plasma Enhanced Chemical Vapor Deposition
PECVD法沉积类金刚石膜的结构及其摩擦学性能
11.
Preparation of Silicon-based Silicon Nitride Films by PECVD and Research on the Wearing Properties
PECVD法硅基氮化硅薄膜的制备及其耐磨性研究
12.
Study on the Hydrophobic Fluorinated Amorphous Carbon(a-C:F) Film Deposited by DBD-PECVD
DBD-PECVD法制备高疏水性氟碳聚合物(a-C:F)薄膜的研究
13.
Study on Intrinsic/B-doped na-Si:H Thin Film Deposited by Plasma Enhanced Chemical Vapor Deposition;
PECVD法制备本征/掺硼纳米非晶硅薄膜及其性能研究
14.
The Properties of Diamond-like Carbon Films on Stainless Steel by rf PECVD;
rf PECVD法在不锈钢表面沉积类金刚石碳膜的性能研究
15.
SnO_2 Films Prepared by PECVD and Their Applications on CdS/CdTe Thin Film Solar Cells;
PECVD法制备SnO_2薄膜及其在CdTe薄膜太阳电池中的应用
16.
Fabrication of Hydrogenarated Amorphous Silicon Thin Films by PECVD and the Study of Metal Induced Crystallization;
PECVD法制备氢化非晶硅薄膜及其金属诱导晶化研究
17.
Synthesis of Carbon Nanotubes Using Dielectric Barrier Discharge Plasma Enhanced Chemical Vapor Deposition (DBD-PECVD);
利用DBD-PECVD方法制备碳纳米管的研究
18.
Synthesis and Characterization of Diamond-like Carbon Films by rf. PECVD;
利用射频PECVD方法生长类金刚石薄膜的实验研究