1.
Research on Silicon Nitride Thin Film for Solar Cells and Hydrogen Passivation;
太阳电池用氮化硅薄膜及氢钝化研究
2.
Annealing Behavior of Silicon Nitride Thin Film Deposited by PECVD;
PECVD沉积的氮化硅薄膜热处理性质研究
3.
Low Stress Silicon Nitride Thin Film Deposition by PECVD
低应力PECVD氮化硅薄膜的制备
4.
Study on the silicon-nitride film in MEMS switches
MEMS开关中氮化硅薄膜工艺研究
5.
Preparation of Silicon-based Silicon Nitride Films by PECVD and Research on the Wearing Properties
PECVD法硅基氮化硅薄膜的制备及其耐磨性研究
6.
Effect of N_2O Plasma Treatment on Luminescence of Silicon-rich Silicon Nitride Films
N_2O等离子体处理对富硅氮化硅薄膜发光的影响
7.
Optical Absorbtion and Photoluminescence Properties of Silicon Nutride Films;
氮化硅薄膜的光吸收及光致发光性质研究
8.
Preparation and Optical Properties of Silicon Nitride Films with Helicon Wave Plasma Chemical Vapor Deposition;
氮化硅薄膜的螺旋波PECVD及其光学特性研究
9.
Microstructures and Properties of Silicon Nitride Films Grown by Unbalanced Magnetron Sputtering
非平衡磁控溅射制备氮化硅薄膜及其性能研究
10.
Investigation of Acid Texturing of Poly-Si and Properties of Silicon Nitride after Rapid Thermal Process;
酸腐多晶硅表面织构及氮化硅薄膜快速热处理性能的研究
11.
Silicon Nitride Film Transfer Technology and Fabrication of One Dimensional Photonic Crystal Based on Porous Silicon;
氮化硅薄膜转移技术与多孔硅基一维光子晶体制备研究
12.
Preparation of Amorphous Silicon Nitride Film by ECRCVD;
用电子回旋共振化学气相沉积(ECRCVD)方法制备非晶态氮化硅薄膜
13.
Study on the Mechanical Properties of Silicon Nitride Film and Its Applications in RF MEMS Switches;
氮化硅薄膜力学性能的研究及其在射频MEMS开关中的应用
14.
Study of Low Temperature Plasma Enhanced Chemical Vapor Deposition and the Preparation of Si_3N_4 Thin Film;
低温等离子体增强CVD技术及制备氮化硅薄膜的研究
15.
Light-emitting Thin Films and Devices Based on Silicon-rich Nitride and Nano-silicon Multi-quantum-well Structures
富硅氮化硅和纳米硅多层量子阱硅基发光薄膜与器件
16.
Field Emission Characteristics of Boron Nitride Films Deposited on Si-tip Arrays
沉积在硅尖上的氮化硼薄膜的场发射特性(英文)
17.
Electroluminescence from a Mn~(2+) Activated SiO_2:Si Film on n~+-Si Substrate
硅基掺锰富硅氧化硅薄膜的电致发光
18.
Research on Preparation of Silicon Carbonitride Thin Films and Photoluminescent Properties;
硅碳氮薄膜的制备与发光性能的研究