1.
Finite Element Analyses of Some Photon and MEMS Devices;
典型光子器件和MEMS器件的有限元分析
2.
Fabrication of MEMS Devices Used in Biomedical Detection;
应用于生物医学检测的MEMS器件的制造
3.
Preparation and Capability PZT Thin Film in MEMS;
MEMS器件用PZT薄膜的制备及性能研究
4.
System Dynamics Modelling and Analysis of MEMS Device;
MEMS器件的系统动力学建模与分析
5.
Study of RF MEMS Device Integration and Functional Material Application;
RF MEMS器件集成及其功能材料应用研究
6.
VHDL-AMS Modeling Approach to Electrostatically Actuated Mems Devices;
力电耦合MEMS器件的VHDL-AMS建模方法
7.
Study on Testing Method for Surface Profiling of MEMS' Devices with Trench Structure
MEMS器件深槽侧壁形貌测试方法研究
8.
Circuit Design to Get The Attitude of Drilling Machine Based on MEMS Sensors
基于MEMS器件的随钻测量单元电路设计
9.
On-Line Examination Method of Bonding Strength Measurement in Silicon MEMS Devices
硅MEMS器件键合强度在线检测方法
10.
Implementation of Attitude Heading System based on MEMS Units
基于MEMS器件的姿态航向系统实现
11.
Aerocraft navigation and control system design based on micro-electromechanical device
基于MEMS器件的飞行器导航控制系统研究与设计
12.
Research on the Technology of Strapdown Attitude Measurement System Based on MEMS Sensors;
基于MEMS器件的捷联姿态测量系统技术研究
13.
MEMS Devices Fabricated by Microfabrication Technology: Research Status and Prospect;
制备MEMS器件的微细加工技术:研究现状与展望
14.
Research and Implementation of Attitude Measurement System Based on MEMS Sensors
基于MEMS器件的姿态测量系统研究与实现
15.
Reliability Investigation and Testing System Development of MEMS Devices
MEMS器件的可靠性研究与测试系统的开发
16.
Fabrication and Study of the RF MEMS Switches;
RF MEMS开关器件的制作及研究
17.
Study on the Effect Form Parameters on MEMS Hall Device Properties;
形状参数对MEMS霍尔器件性能影响研究
18.
Device level vacuum packaging technologies of MEMS gyroscopes
MEMS陀螺仪器件级真空封装技术