Mechanical-electrostatic coupling and distortion research for MEMS line vibration gyroscope

This paper concentrates on the designing method of closed loop system of vibratory gyro based on analysis of the coupling error of vibratory gyro.

In order to improve the output signal s sensitivity of micromachined vibratory gyroscope,the frequency of the driving voltage is required to be equal to the resonant one of the gyroscope s driving mode.

The control object in a single-freedom silicon micromachined vibratory gyroscope is the proof mass,because of system structure,feedback control is the only choice to control the proof mass.

A differenfial equation model has been established to represent the interrelationship between θ and φ using Euler s dynamics equation,θ is the angle between the base and the driving wheel of the micromachined vibratory wheel gyroscopes, and φ is the angle between the driving wheel and the outer frame of the micromachined vibratory wheel gyroscopes.

In this paper, the work principle of the micromachined vibratory wheel gyroscopes is introduced, the sketch of the structure and the figure of the work principle of the micromachined vibratory wheel gyroscopes is given.