1) Anisotropic wet chemical etching
各向异性湿法化学腐蚀
2) anisotropic etching
各向异性腐蚀
1.
Micromachining of sensors——Computer simulation of the Anisotropic etching course;
传感器的微机械加工中各向异性腐蚀过程的计算机模拟
2.
The corner undercutting was quite serious because of the anisotropic etching on crystalline Si(100)wafer.
在进行Si(100)台面腐蚀时,由于硅的各向异性腐蚀特性,凸角处呈现严重切削现象。
3.
New type of magnetic sensitivity transistor is based on SOI,whose design principle and process are expatiated,and whose recombination region is set by anisotropic etching technology in MEMS.
构成新型磁敏三极管的复合区采用MEMS中的各向异性腐蚀技术进行设置,给出了这种复合区的复合机理。
4) Anisotropic Wet Etching
各向异性腐蚀
1.
The silicon chip of dual E form non integral structure has been introduced, which is prepared by the technique of anisotropic wet etching of silicon and acceleration sensor element by combining this kind of silicon chip with different mass bulk and packaged based on this chip.
本文在简要介绍了 ,利用硅的各向异性腐蚀工艺研制的 ,双 E非整体弹性膜式硅芯片结构的同时 ,又较详细地报告了 ,用此芯片封装成的硅加速度敏感元件及硅加速度传感器结构 ,最后介绍这种加速度传感器的优良性
2.
The silicon chip of dual-E form non-integral structure has been introduced, which is prepared by the technique of anisotropic wet etching of silicon and the sensor of pressure sealed and packaged based on this chip .
介绍利用硅的各向异性腐蚀工艺腐蚀出的一种双E形结构非整体结构弹性膜硅芯片及用此芯片封装成的压力敏感元件。
5) KOH anisotropic etching
KOH各向异性腐蚀
6) anisotropic etchant
各向异性腐蚀剂
补充资料：各向异性
分子式：
CAS号：
性质：晶体内部微粒具有规则的晶格结构，故其物理性质随方向而不同，表现出各向异性的特点。如石墨层平行方向上电导率比垂直方向大一万倍，故不同方向导电性不同。
CAS号：
性质：晶体内部微粒具有规则的晶格结构，故其物理性质随方向而不同，表现出各向异性的特点。如石墨层平行方向上电导率比垂直方向大一万倍，故不同方向导电性不同。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条