In view of the request for micro-processing pulse frequency, this article has used 8254 chip, A/D converting chip and singlechip to complete the pulse occurrence and the control function through the software, guaranteed the pulse precision and the controllability, which will provide the convenience for the electric spark following processing.

Development of a Practicl Excimer Laser Micromachining Tool;

This technique has been considered one of the most appropriate micromachining methods for hard and brittle materials,especially for compiex microstructures,since the productivity is high and heat affected layers ar.

In this paper,the authors present the working principle,characteristics and the applications in micromachining of wire electro discharge grinding(WEDG) technology.

In this paper, via exemplifications the authors summed the achievements in micro machining by using non traditional machining methods which include electrical discharge machining, electrochemical machining, ultrasonic machining, laser machining, precision electroforming and the like.

The general situation and characteristics of non traditional machining technology are introduced, and the common non traditional machining methods used in precision machining and micro machining, including their technological features,application fields and machining accuracy, are also commented.

With the development of new materials and micro machine, especially new hard and brittle material such as silicon, ceramics, hard metal alloy, the micro machining process technology of these materials is becoming the hot studying spot.

Application of Micro-machine Productions and Development of Micro-machining Methods;

The new development of MEMS and micro-machining;

Research on Numerical Control System for Multi-Function Micro-Machining Tool;

Several useful microfabrication techniques were reviewed including ultraprecision machining,LIGA and LIGA-like,micro electrodischarge machining,micro electrochemical machining and selective electrodeposition for producing metal micro/meso-structures &-devices,and their advantages and disadvantages were analyzed.

Biological and chemical reactions included in biology and medicine can be carried out on the biochip made with microfabrication.

The principle of process,characteristic and research status on the several typical microfabrication techniques used to fabricate MEMS devices are given a review in this paper.

Hence,as a new functional material, diamond's micro-fabrication technology is crucial for practical applications.

Working along with the new technology of immunoassay, biochemical immobilization and micro-fabrication, bio-detectting technology of electrochemiluminescence is becoming a kind of more effective measuring method with higher precisiion and wider applying range.

The new technologies of rapid prototyping and micro electro mechanical systems (MEMS) and its micro-fabrication are introduced, and the advantages and disadvantages of some micro-fabrications based on rapid prototyping and their new progress are contrastively analyzed.