1) light-guide wall
光波导管
1.
For 351nm excimer suited for conventional photoresists exposure,light-guide wall used for laser beam homogenizer directly outputs an illuminated hexagonal beam appeared as uniformity which can achieve completely seamless scanning lithography in the large-area laser projection system.
351nm波长的准分子激光器由光波导管作为激光均束器,直接输出正六角形均匀分布的照明光束,能在大面积激光投影光刻中实现无缝扫描。
2) waveguide laser
波导管激光
3) wavebeam guide
(1)光导管(2)波导管
4) branching lightguide
分支光波导管
5) lightguide joint
光波导管连接
6) optical waveguide coupler
光波导管耦合器
补充资料：光波
光①。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条