1) resolution enhancement lithography assisted by chemical shrink(RELACS)
分辨率增强光刻辅助化学收缩
2) Spectral resolution enhancement
光谱分辨率增强
1.
In spectral resolution enhancement the linear prediction of exponentially decaying sinusoidal superposition signal is one of the key technologies.
在光谱成像的光谱分辨率增强技术中,对振幅衰减干涉信号的线性预测是其中的关键之一。
3) Laser assisted chemical etching
激光辅助化学刻蚀
1.
The laser assisted chemical etching was proposed to apply in the etching of YBCO high temperature superconductor(HTS)film,which was a significant application involving superconductor electronics,laser technique and chemistry.
提出了将激光辅助化学刻蚀技术应用于钇钡铜氧(YBCO)高温超导薄膜的刻蚀,研究了无掩膜YBCO薄膜激光化学刻蚀的表面特性及其变化规律,为YBCO激光化学刻蚀技术中图形形状控制、刻蚀时间选择和激光功率调节等提供了重要的实验结论。
2.
The laser assisted chemical etching was proposed to apply in the etching of YBCO high temperature superconductor film.
提出了将激光辅助化学刻蚀技术应用于钇钡铜氧(YBCO)高温超导薄膜的刻蚀,研究了无掩膜YBCO薄膜激光化学刻蚀的表面特性及其变化规律,在激光辐照下,YBCO薄膜的液相刻蚀速率大大加快,并且在整个过程中,刻蚀速率呈现加快趋势,这一特性将有可能用于改善YBCO刻蚀中的横向钻蚀情况,并提高图形边缘的侧壁陡峭度。
4) PAECE
光辅助电化学刻蚀法
1.
The main four fabrication techniques, namely laser drilling, wet etching, DRIE (deep reactive ion etching) and PAECE (photo assisted electro-chemical etching), are described in detail from the several aspects of principle, process, advantages and disadvantages.
介绍了硅基片微型通孔的用途及在微机电系统发展中的重要性,从原理、过程、优缺点等方面详细叙述了激光打孔法、湿法刻蚀法、深度反应离子刻蚀法(DRIE)和光辅助电化学刻蚀法(PAECE)等四种硅基片微型通孔的加工方法,并对各种方法进行了比较,提出了各种方法的适用范围。
6) resolution enhancement
分辨率增强
1.
Unified frame based on sparse prior for optical and SAR image resolution enhancement;
基于稀疏先验的光学及SAR图像的分辨率增强统一框架
2.
Aimed at the problem of resolution enhancement of millimeter-wave radiometric image,a new resolution enhancement method is proposed.
针对毫米波辐射图像分辨率的增强问题,提出一种新的分辨率增强方法,该方法将双三次插值与非线性外推算法相结合。
3.
Aimed at the problem of low resolution of millimeter wave radiometric image,a new resolution enhancement method is proposed.
针对毫米波辐射图像分辨率低的问题,提出了一种新的分辨率增强方法。
补充资料：高光谱分辨率遥感图像及图像光谱信息提取
高光谱分辨率遥感图像及图像光谱信息提取
高光谱分辨率遥感图像及图像光谱信息提取 郑兰芬供稿
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条