Endpoint detection in high density plasma etching system based on IEP;

The most obviously of all, it needs oneefficient endpoint detection system to monitor CMP operation to avoid polishing over or not polish-ing completely.

Importance and means of signal measurement and processing in control of three main electric and mechanical equipment for walking beam heating furnace are discussed.

METHODS: Based on the principle of EIS, we set up a workplace used in signal measurement and analyzed the amplitude and phase of the measuring signal from the human body.

The realization of the signal measurement and signal processing technique for the intelligent sensor is illustrated,and intelligent sensor network interface is discussed.

The hardware reliable design of signal detectcircuit in the optical gigabit Ethernet adaptor;

The effects of time step of numerical computing and drive input white noise on movement features of a Duffing oscillator in weak signal detection, especially, their effects on its chaotic critical state and big scale periodic state, are studied.

It is a new method of currently signal detection in time field that the weak signal detection using chaos system for its good performance in report.

Establishment of quantitative signal detection system on adverse drug reaction spontaneous reporting database of Shanghai;

Multi-channel self-correlation signal detection algorithm and its FPGA implementation;

Study of the sensitivity of novel re-entrant fiber optic gyroscope s signal detection;

The adaptive optimization of detection thresholds for tracking in clutter is an important issue in tracking.