Within the limit of fabricating techniques,2000 l /mm self-standing transmission gratings model was designed.

The fabrication techniques for soft X-ray transmission gratings;

Searching white light interference fringes of Michelson interferometer by using transmission grating;

Numerical analysis of diffraction for hyperbolic cylinder transmission grating

For fabricating X-ray mask of high line-density X-ray transmission gratings,the field stitching of E-beam lithography was analyzed when patterning high line-density gratings;by using pattern correction and low sensitive 950 k PMMA resist,the proximity effect of electron beam was effectively depressed when exposing thick resist spun on polyimide membrane.

The manufacture of high-line-density X-ray transmission gratings for X-ray spectroscopy by using electron beam lithography and X-ray lithography was reported.

Fabrication of high-aspect-ratio and high-density X-ray transmission grating

Using the same fabrication processes,the X-ray transmission grating,which has the line density of 3333 1/mm and the thickness of 1000 nm,has been fabricated.

A newly developed high efficiency high resolution,large size transmission grating spectrograph for higher collection efficiency and higher spectral resolution used in laser pro- duced plasma diagnosis is reported.

Combined with a high efficiency, high spectral resolution large size transmission grating spectrograph, the differential pump system is especially suitable for the research of the ultrashort pulsed laser gas puff target interaction.