Research on signal processing system of heterodyne interferometer instrument for measuring surface roughness with high accuracy;

Based on the optical heterodyne interferometer and transmission ellipsometry, a new fast measurement technique of nanometer film was presented computational.

At last,a novel method based on laser heterodyne interferometer for measuring multi-degree-of-freedom is proposed,and this method is capable of realizing long-range and high-accuracy.

Automatic real-time compensation of vacant band error based on monitor the laser heterodyne interferometry timely;

High acceleration ultra-precision measurement model in laser heterodyne interferometry;

In order to achieve high measuring resolution in wide measuring range with laser heterodyne interferometry measurement in nanometer level,a novel integer-fraction combined signals processing method is presented.

With the improvement of measurement velocity in laser heterodyne interference,the theoretical error of laser heterodyne interference seriously restricted the accuracy of measurement.

The main inducements of American abroad interference include two factors: country advantage and ideology.