1) mutually perpendicular lines
互相垂直线
3) mutually perpendicular lines
互相垂直
6) vertical feedthrough
垂直互连线
1.
In this paper, a novel packaging structure model which is performed using wafer level micropackaging on the thin silicon substrate as the Ka band distributed MEMS phase shifters wafer with vertical feedthrough is presented.
本文提出一种适用于Ka波段分布式MEMS移相器的新型封装结构——具有垂直互连线的薄硅作为分布式MEMS移相器衬底,并用芯片微封装方法对移相器进行封装。
补充资料：互相
副词，表示彼此同样对待的关系：～尊重 ㄧ～帮助ㄧ～支持。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条