1) graduated bushing
有刻度的衬套
3) index thermometer
有刻度的温度计
4) overlay accuracy
套刻精度
1.
Recent progress in technology of wafer stage and reticle stage used in step-and-scan lithography system is introduced, and the overlay accuracy and the accuracy of the overall system are analyzed.
着重介绍了当前国外步进扫描投影光刻机的工件台和掩模台的发展状况,并对套刻精度和整机精度进行了分析。
2.
The demonstrated overlay accuracy of this system is better than 40nm.
对该系统的分辨率、稳定性、场拼接和套刻精度进行了系列研究 ,得到了分辨率为 30 nm的图形 ,图形的套刻精度也优于 4 0 nm。
3.
The overlay accuracy is one of the most important specifications of the stepper.
套刻精度是步进式光刻机最重要的指标之一。
5) Bushing Stiffness
衬套刚度
1.
Research and Optimization of Bushing Stiffness of Front Double-Arm Suspension;
双横臂独立前悬架中橡胶衬套刚度的研究及优化
6) lining thickness
衬套厚度
补充资料:铜电阻温度计(见电阻温度表)
铜电阻温度计(见电阻温度表)
tongdianzuwendubiao铜电阻温度表见电阻温度表。
说明:补充资料仅用于学习参考,请勿用于其它任何用途。
参考词条