A vertical scanning white-light measurement system was designed to measure the profile characteristic of micro electro mechanical systems(MEMS) based on vertical scanning white-light interferometric measurement principle.

This paper presents a novel precision three-dimensional platform based on vertical scanning that has practical application in surface topography measurement.

In order to describe the object s shapes steadily by chordal distribution in object s region,region main chord and it s perpendicular scanning chords were defined firstly in the paper and their computation method was put forward.

In this paper,the interferograms being got value from the micro system analyzer are analyzed using vertical scanning interferometry,and the 3D surface profile of the micro step structure is reconstructed.

The differential vacuum seal for the vertical scanner is calculated and designed in this article,the result show that the vertical scanner has the feature of non-friction and very little gas leakage, hence which can satisfy the high vacuum need and metal contaminated need for the chamber in the wafer process.

According to the zero offset,the piezoelectric actuator and the servo motor drive the vertical scanning platform to move vertically to ensure that the lever return to balance position at every sample interval.