Research developments of rare earth borophosphate phosphors;

Recently, borophosphate has attracted much attention during the continuous searching for new functional materials.

Due to their potential industrial applications in various aspects, the research on borophosphates has attracted many scientists and become a hot field.

The two borophosphates were characterized by powder X-ray diffraction.

Green emitting phosphors of yttrium borophosphate doped with Ce 3+ ,Tb 3+ and Gd 3+ have been prepared by reaction of BPO 4 with rare earth oxides for the first time.

Analysis and Research Results of BPSG on Abnormal Problem;

The borophosphosilicate glass(BPSG) layers as the filling coatings to silica-based planar lightwave circuits were obtained by using plasma enhanced chemical vapor deposition with SiH_4/N_2O and PH_3,B_2H_6.

As an important inter-layer dielectric, BPSG thin films deposited by atmospheric pressure chemical vapor deposition (APCVD) were used widely in most wafer techniques.