1) focus monitoring
聚焦监测
2) focusing detection
聚焦检测
1.
Its main components are optical path of focusing detection which based on improved foucault knife method,focusing servo system,quantitative measuring equipment and mechanical adjusting mechanism.
对一种基于激光聚焦伺服式传感器的激光聚焦伺服式轮廓仪的基本原理进行了阐述,给出了整体设计方案,并对测量过程中聚焦检测信号模型进行了分析。
3) Focus detection
聚焦探测
1.
A novel optical stylus profilometer based on dynamic focus detection is introduced.
介绍了一种新型的基于动态聚焦探测法的光学轮廓仪,该仪器可实现表面形貌的快速、非接触测量,其最大测量范围为500μm,最小分辨率可达10nm。
2.
A focus tracing sensor based on focus detection for measuring surface topography is introduced.
介绍了一种新型的基于聚焦探测法的自动焦点跟踪传感器,该传感器可实现表面形貌的快速、非接触测量,其测量范围为500 μm ,分辨率可达3 nm ;详细地描述了该传感器的工作原理、关键技术的实现及其应用。
4) focus forecasting
聚焦预测
6) focusing sensor
聚焦式测头
1.
Evaluation of step height standard with high accuracy is realized using a nano-measuring machine(NMM)integrated with a focusing sensor.
利用集成聚焦式测头的纳米测量机实现了高精度的台阶高度标准评价,该系统的测量范围可以达到25mm×25mm×5mm。
补充资料:冲击波聚焦效应