Study of GaN Epitaxial Growth on Si-based Micro Structures;

Design of silicon microstructure for micro electro-mechanism sensor system;

In this paper, the first part is the analysis of the characteristics of material and microstructure of micromachined silicon accelerometer, then a new silicon microstructure is designed on the basis of several type of micromachined silicon accelerometer in being.

Simulation of the heat transfer in silicon micro-bridge in IRFPA used the finite element method;