2) silicon incorporated diamond-like carbon
掺硅类金刚石薄膜
1.
Hydrogen-free diamond-like films and silicon incorporated diamond-like carbon films were deposited by direct current magnetron sputtering with Ar gas, graphite and silicon chips on the single-crystal silicon and optical glass substrates.
本文采用直流磁控溅射方法,以普通光学玻璃和单晶硅为基底,Ar为工作气体和石墨以及硅片为靶材,制备无氢类金刚石薄膜和掺硅类金刚石薄膜。
4) Ti-DLC
掺钛类金刚石膜
5) diamond-like caron films
掺杂类金刚石膜
6) Cr-DLC
掺铬类金刚石膜
补充资料：金刚起
【金刚起】
（术语）以印明惊觉法界之诸佛，曰金刚起。
（术语）以印明惊觉法界之诸佛，曰金刚起。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条