1) SU8 optical waveguide
SU8光波导
2) SU8 lithography
SU8光刻
1.
The fabrication of micro-fluidic chips by SU8 lithography on transparent substrate for integrated optical detection was studied,and the factors affect on the quality of lithography such as substrate s thickness,transparency and reflectivity of sample holder surface were discussed.
研究了在透光性基底上直接光刻SU8光刻胶制作可实现光集成微流控芯片的工艺,讨论了基底厚度、透光性和样品承载台表面反射性等因素对透光性基底上SU8光刻图形质量的影响。
3) SU8 negative photoresist
SU8负性光刻胶
1.
Researches on the two-photon photopolymerization technology of SU8 negative photoresist have been processed.
飞秒激光SU8负性光刻胶双光子聚合工艺研究。
4) weakly guiding optical waveguide
弱导光波导
5) optical waveguide
光波导
1.
Development of an automatic system for mode distribution measurement of optical waveguides;
光波导模场分布自动检测系统的研制
2.
Control of dispersion in microring coupled-resonator optical waveguides;
微环耦合谐振光波导中的色散控制模型与数值仿真
3.
Preparation of SiO_2-TiO_2 planar optical waveguide with sol-gel method;
溶胶-凝胶法制备SiO_2-TiO_2平板光波导工艺研究
6) guided-wave optics
导波光学
补充资料:光波导
光波导 optical waveguide 由光透明介质(如石英玻璃)构成的传输光频电磁波的导行结构。光波导的传输原理是在不同折射率的介质分界面上,电磁波的全反射现象使光波局限在波导及其周围有限区域内传播。现代应用的光频的波长介于0.8~1.6微米之间。实用光波导有光导纤维、薄膜波导、带状波导3类。光导纤维的一个传输特性是衰减很小、频带很宽、抗电磁干扰,主要用于通信;光导纤维的另一传输特性是对外界的温度和压力等因素敏感,因而可制成光导纤维传感器,用于测量温度、压力、声场等物理量。薄膜波导与带状波导主要用于制作有源和无源的光波导元件,如激光器、调制器和光耦合器等。它们采用半导体薄膜工艺,适合于制成平面结构的集成光路(即光集成部件)。 |
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参考词条