1) oxygen precipitate nucleation
氧沉淀形核
1.
Effects of low-temperature annealing on oxygen precipitate nucleation in heavily arsenic-doped Czochralski silicon;
低温退火对重掺砷直拉硅片的氧沉淀形核的作用
2) oxygen precipitate morphology
氧沉淀形态
3) oxygen precipitate
氧沉淀
1.
Grown-in oxygen precipitates in czochralski silicon investigated by transmission electron microscopy;
直拉硅单晶中原生氧沉淀的透射电镜研究
2.
The results revealed that oxygen and carbon concentration of mc-Si had a greater decrease than that of CZ-Si,which means the more oxygen precipitates in mc-Si were generated.
实验发现:经三步退火后,多晶硅比单晶硅氧碳含量下降的幅度大,这表明多晶硅内部形成的氧沉淀多,其体内的高密度缺陷如晶界、位错等对氧沉淀的形成有促进作用。
3.
The behavior of oxygen precipitates in NCZ silicon during the simulated solar cell thermal process was studied by Fourier Transformation Infrared Ray(FTIR).
利用傅立叶红外光谱仪研究了掺氮直拉单晶硅(NCZ)和普通直拉单晶硅(CZ)的原生氧沉淀以及模拟太阳电池制备热处理工艺下的氧沉淀行为。
4) oxygen precipitates
氧沉淀
1.
The mechanisms for the effect of hydrogen on the enhancement of oxygen diffusion and formation of thermal donors and oxygen precipitates are introduced.
总结了氢对直拉硅(CZ)单晶中缺陷影响的研究进展,主要介绍了氢促进氧扩散、热施主和氧沉淀生成,以及高温氢气退火促进直拉硅片空洞型缺陷消除的机理,其中氢促进硅中氧的扩散被认为是氢对直拉硅中的缺陷产生影响的主要原因。
2.
s:The effect of annealing atmosphere on the behavior of oxygen precipitates and their induced defects in Czochralski silicon during high temperature annealing is investigated.
研究了五种不同的热处理气氛对直拉硅中氧沉淀及其诱生缺陷的影响。
3.
The effect of rapid thermal processing(RTP) on oxygen precipitates profile and denude zone(DZ) in Czochralski(CZ) silicon wafer during simulating CMOS processing is investigated.
本文研究了快速热处理工艺(RTP)在模拟的CMOS热处理工艺中对直拉硅单晶中氧沉淀和洁净区(DZ)的影响。
5) oxygen precipitation
氧沉淀
1.
Study on as -grown oxygen precipitation in N-doped CZ silicon;
微氮直拉硅单晶中的原生氧沉淀
2.
Development on oxygen precipitation in heavily-doped Si;
重掺硅衬底材料中氧沉淀研究进展
3.
Effect of nitrogen on oxygen precipitation in Czochralski silicon during high-temperature annealing;
直拉硅中氮在高温退火过程中对氧沉淀的影响
补充资料：晶形沉淀
分子式：
CAS号：
性质： 沉淀类型的差别主要依据沉淀颗粒大小的不同，直径在0.1～1μm的颗粒称为晶形沉淀。例如磷酸镁铵(MgNH4PO4)、硫酸钡(BaSO4)都属于晶形沉淀。在定量分析和化学分离中，晶形沉淀易于过滤和洗涤。
CAS号：
性质： 沉淀类型的差别主要依据沉淀颗粒大小的不同，直径在0.1～1μm的颗粒称为晶形沉淀。例如磷酸镁铵(MgNH4PO4)、硫酸钡(BaSO4)都属于晶形沉淀。在定量分析和化学分离中，晶形沉淀易于过滤和洗涤。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条