1) silicon micromachined
Si基微机械
1.
A silicon micromachined vertical transition was presented,which can be used for 3-dimentional(3D) millimeterwave integrated circuits.
介绍了一种适用于三维毫米波集成电路的Si基微机械垂直过渡,该垂直过渡是两层0。
2) MEMS
微机械
1.
The Application of Nanometer Material and Technology Field of MEMS;
纳米材料与技术在微机械领域中的应用
2.
ELECTRODEPOSITED Fe-Ni ALLOY FILMS FOR MEMS APPLICATIONS;
用于微机械器件的电镀Fe-Ni合金薄膜的研究
3.
LASER THREE DIMENSIONAL MICROMACHINING FOR MEMS;
微机械系统三维微结构的激光加工技术
3) micro-machine
微机械
1.
Melting property of rod in nano-machine and micro-machine;
纳米机械和微机械中杆的熔化性质
2.
Study on the mechanical stiffness of the flexible beams in a micro-machined accelerometer;
微机械加速度计挠性梁机械刚度的实验研究
3.
In the micro-machine,the construction size of parts not only is small but also is made of flexible material.
由于微机械中的零件结构尺寸小,并且有些采用柔性材料制造,采用接触式的测量方法检测受到限制,寻求有效的微测量手段已成为国际微机械研究的热点之一。
4) micro mechanism
微型机械
1.
Micro mechanism has a super little shape and characteristics of least influence from factors such as heat swell, noise and wind, working stably at high speed,low energy waste, little inertia, high resonance frequency, short response time, no delay, saving materials and low costs.
微型机械具有体形超小,受热胀、噪声和挠曲等影响甚微,高速工作稳定,能耗低,惯性小,谐振频率高,响应时间短,无延迟,节约材料、成本低等特点,可用蚀刻工艺制作,适宜大批量生产。
5) Millimachine
微小机械
6) micromachining
[,maikrəumə'ʃi:niŋ]
微机械
1.
A Study on 1kPa Low-pressure Sensor with a Micromachining Structure;
1kPa 微机械结构微压传感器的研究
2.
Based on bulk micromachining,SU-8 photoresist processing and piezoresistive sensing technologies,a novel 2-D flow sensor is introduced firstly where a pillar-beam structure converts the flow velocity and direction into the deflection of the pillar and corresponding deformation of the beams.
本文设计了一种基于体微机械加工技术、SU-8-光刻胶工艺和压阻检测的新型硅压阻式流速流向传感器。
3.
To meet the needs of miniaturized Bluetooth devices, the paper presents a cavity shorted microstrip antenna manufactured by micromachining process.
集成电路与微机械天线对于基底介质的要求不同 ,前者需要高介电常数的介质 ,而后者所需介质的介电常数则较低 ,要将两者集成到一起存在一定困难。
补充资料：氮化硅(si_(3)N_(2))基陶瓷制品
氮化硅(si_(3)N_(2))基陶瓷制品
氟化硅(s11N z)基陶瓷制品中国科学院上海硅酸盐研究所供稿
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条