Basis on analysis the insufficency of plan maintenance system in advance, the decision new pattern of equipment maintenance management is put forward according to inspection information.

With reference to American locomotive maintenance system,the author discusses the innovation of Chinese locomotive maintenance system,points out that the concept of transition to “State maintenance”from“scheduled and preventive maintenance” is incorrect.

Based on the complexity of semiconductor manufacturing system and the characteristic of cluster tools,a real-time optimal model of preventive maintenance scheduling for cluster tools based on system standpoint is developed and a GA method is devised.