But, under the condition of large NA and low process coefficient,the impacts on CD uniformity, which come from the flare, aberration and polarized light,are becoming more p.

Analysis of diversity and evenness of heavy metal pollution in river sediments of Baotou section of the Yellow River;

Analyses of Relations between Evenness of Export Cotton Sliver and Longitudinal Evenness of Import Lap on Cards;

Study on Intake Charge and Distribution Evenness in Gasoline Engines;

Thickness uniformity of Ni microstructure deposited by through-mask electroplating;

Quantitative characterization of uniformity of cells in aluminum foams;

Study of nanostructure and uniformity of fluorocarbon films prepared on PET substrates;

The Meso-damage Evolution of Metal for the Initial Void Inhomogeneity;

Research of consolidating inhomogeneity of silt seabed in Yellow River estuary shore;

Experimental reduction and analysis of the negative inhomogeneity of CeO_2 films;

Effects of cure furnaces on the curing homogeneity for polycarbosilane fibers;

Preparation,homogeneity and stability of crude fat reference material;

A little experience from homogeneity testing of cast iron standard sample for spectrometric analysis;