Due to the coupling of micromachined membrane deformable mirror (MMDM) is much larger than that of the common deformable mirror.

An close-loop real-time algorithm of improvement singular value decomposition(SVD) modal reconstruction of wavefront was introduced in order to solve the optimal control voltages of adaptive optics based on the micromachined membrane deformable mirror(MMDM) and reduce the incident wavefront aberration to the minimum.

During the study, this paper by finite element analysis software ANSYS/CFX, based on the fluid-solid iteration method, analyze hydrostatic bearing film sluice’s pressure and film deformation for island film sluice and normal film sluice, getting the two sluices’oil film pressures and film deformations under the same boundary conditions.

Using ANSYS and fluid-structure interaction,the pressure distributions and the film deformations are analyzed for island film sluice and normal film sluice of hydrostatic bearing,in the same boundary condition,attaining the up-down oil reservoir pressure distributions and film deformations of the two kinds of sluices.

Simulation and comparison of several segmented micro deformable mirrors;

Shape functions were used to describe the surfaces of the micro def ormable mirrors in working state,and four kinds of micro deformable mirrors wit h different arrays were simulated in aberrated wavefronts correction.

A system-level behavioral model of segmented piston-like micro deformable mirrors was accomplished by utilizing our own-developed integrated design platform for MEMS CAD.